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1 0 0 0 Microscopic FCA system for carrier lifetime measurement in SiC with high spatial resolution

著者
Keisuke Nagaya Takashi Hirayama Takeshi Tawara Koichi Murata Hidekazu Tsuchida Akira Miyasaka Kazutoshi Kojima Tomohisa Kato Hajime Okumura Masashi Kato
出版者
ICSCRM2019 Organizing Committee
雑誌
International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
巻号頁・発行日
2019-07-19