著者

澤野 宏 松本 拓也

出版者

一般社団法人 日本機械学会

雑誌

日本機械学会論文集 (ISSN:21879761)

巻号頁・発行日

vol.83, no.855, pp.17-00127-17-00127, 2017 (Released:2017-11-25)

参考文献数

9

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Demands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy, but also a coordinate measuring machine with a nanometer scale measuring resolution for evaluating the machined parts profile. A scanning tunneling microscopy (STM) and atomic force microscope (AFM) probes have a high measuring resolution. However, in the STM, the specimen to be measured needs to have conductivity, and the AFM cannot measure a step shape or a slope. It is thought that the application of the profile measurement by the AFM probe can be expanded, by development the AFM probe suitable for the measurement of the slope shape. Therefore, this study proposed a novel AFM probe suitable for measuring the slope shape by using a low rigidity spring. In addition, the basic characteristics of the proposed AFM probe was experimentally investigated. Investigation results confirmed that the proposed AFM probe can detect atomic forces acting between the specimen and the probe.