著者

川村 大伸

出版者

一般社団法人日本品質管理学会

雑誌

品質 (ISSN:03868230)

巻号頁・発行日

vol.44, no.3, pp.276-279, 2014-07-15

---

Although the word of big data is very popular in Japan nowadays, it is not introduced many examples about manufacturing processes relevant to big data. This paper reports several examples of big data on process control for semiconductor manufacturing. Specifically, the number of the measurement point on a wafer, the sensors of semiconductor equipments, QWACS (Quality early Warning Alarm Control System) for real-time statistical process control are introduced, comparing the past with the present. Moreover, QWACS has been developed by NEC Corporation. Furthermore, the examples are discussed from the viewpoints of volume, variety, velocity and veracity which the feature of big data has.