著者

永山 進 林 俊哉 高野 明雄 牧之内 科子 工藤 正博

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.12, no.10, pp.628-634, 1991

被引用文献数

1

---

It is well-known that quantitative analysis of major elements by SIMS is generally difficult because of the matrix effect. In the present paper we examined some basic problems of the major element analysis of Cd<SUB>x</SUB>Hg<SUB>1-x</SUB>Te (CMT) which is known to be easily damaged by various kinds of beams. It was shown that the matrix effect in quantification can be reduced by detecting postionized monoatomic ions for O<SUB>2</SUB><SUP>+</SUP> and Ar<SUP>+</SUP> primary beams. In the case of Cs<SUP>+</SUP> bombardment, detection of the cationized molecular ions, which are formed via one kind of post-ionization process, also proved to be effective. In all the cases, good linear relationships between the secondary ion intensity and the primary ion current density were obtained in the log-log plot. The intensity decrease of Hg<SUP>+</SUP>, however, was observed along with depth profiling of the bulk sample. This phenomenon was correlated with the morphological changes caused by ion irradiation.