著者

Park Wug-Dong Tanioka Kenkichi

出版者

Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

雑誌

Japanese journal of applied physics. Pt. 1, Regular papers & short notes (ISSN:00214922)

巻号頁・発行日

vol.42, no.4, pp.1954-1956, 2003-04-15

被引用文献数

11

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In this paper, spectral responses of Te-doped a-Se HARP (High-gain Avalanche Rushing amorphous Photoconductor) thin films for a solid state image sensor have been reported. Te concentrations of Te-doped layer in a-Se HARP thin film were 15 wt.% and 26 wt.%, and thicknesses of Te-doped layer were 60 nm, 90 nm, and 120 nm. Spectral responses of Te-doped a-Se HARP films were investigated at bias voltages of 40 V and 60 V. Relative sensitivity and quantum efficiency of a-Se HARP films at 60 V were found to be improved by the increase of Te-doped layer thickness. This improvement is explained by the increased photogeneration efficiency at long wavelength region by the increase of Te-doped layer thickness and avalanche multiplication of the photogenerated carriers at a high electric field.