- 著者
-
Sohn Jin-Seung
Cho Eun-Hyoung
Lee MyungBok
Kim Hae-Sung
Jung MeeSuk
Suh Sung-Dong
Kim Wan-Chin
Park No-Cheol
Park Young-Pil
- 出版者
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
- 雑誌
- Jpn J Appl Phys (ISSN:00214922)
- 巻号頁・発行日
- vol.45, no.2, pp.1144-1151, 2006-02-15
- 被引用文献数
-
1
4
A microlens of numerical aperture (NA) 0.85 a small-form-factor optical pickup, following the specifications of the Blu-ray disc (BD), was designed, fabricated and evaluated. To avoid difficulties in the fabrication of a high-NA objective lens and to obtain a low chromatic aberration, a new hybrid lens unit was designed to have a refractive lens and a diffractive lens. The micro-plano-aspheric refractive lens was fabricated using glass molding technology, and the diffractive lens was fabricated in a two-dimensional array using the electron beam mastering and consecutive UV embossing process. For the evaluation of the developed lens unit, diffraction efficiency was measured with the proposed diffraction efficiency measurement method, and the wavefront error of the lens unit was evaluated using a modified Mach–Zehnder interferometer. The measured average efficiency of the diffractive lens was approximately 85% and the RMS wavefront error of the lens unit was 0.0376 $\lambda$rms.