著者

〓橋 秀之

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.25, no.4, pp.224-231, 2004-04-10 (Released:2008-08-12)

参考文献数

14

被引用文献数

5 3

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Specimen damage due to electron beam irradiation is a serious problem for EPMA/SEM observation, which is caused by heat produced in the process of inelastic scattering of incident electrons. The produced heat is in proportion to the specimen current and accelerating voltage and is in inverse proportion to the beam diameter. The thin film method using this substrates for the soft materials is effective to avoid the electron beam damage. Several effective methods to suppress the specimen damage are presented and discussed by using real examples.