著者

馬場 祐治 下山 巖 関口 哲弘

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.23, no.7, pp.417-422, 2002-07-10 (Released:2008-09-01)

参考文献数

18

被引用文献数

1 1

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Solid carbon forms two kinds of local structures, i.e., diamond-like and two-dimensional graphite structures. In contrast, silicon carbide tends to prefer only diamond structure that is composed of sp3 bonds. In order to clarify whether or not two-dimensional graphitic SixC layer exists, we investigate the local structures of SixC layer produced by Si+-ion implantation into highly oriented pyrolitic graphite (HOPG) by means of near-edge X-ray absorption fine structure (NEXAFS). The energy of the resonance peak in the Si K-edge NEXAFS spectra for Si+-implanted HOPG is lower than those for any other Si-containing materials. The intensity of the resonance peak showed a strong polarization dependence. These results suggest that the final state orbitals around Si atoms have π*-like character and the direction of this orbital is perpendicular to the graphite plane. It is elucidated that the Si-C bonds produced by the Si+-ion implantation are nearly parallel to the graphite plane, and SixC phase forms a two-dimensionally spread graphite-like layer with sp2 bonds.