著者

出島 一仁 中別府 修 中村 優斗 土屋 智洋 長坂 圭輔

出版者

一般社団法人 日本機械学会

雑誌

日本機械学会論文集 (ISSN:21879761)

巻号頁・発行日

vol.84, no.858, pp.17-00414-17-00414, 2018 (Released:2018-02-25)

参考文献数

10

被引用文献数

4

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To develop a heat flux sensor for internal combustion engines, two metal substrate thin film resistance sensors have been developed as prototypes by using MEMS (Micro-Electro-Mechanical Systems) technologies. In our previous study, a thin film heat flux sensor on a Si chip was developed for combustion fields. To apply the thin film sensor to the engine, a metal substrate sensor technology has to be developed. To begin with, a flat plate shape sensor with a SUS substrate was made in order to confirm the fabrication process and the performance of the metal substrate MEMS sensor. Heat fluxes were successfully measured in laminar premixed combustion fields, and it was confirmed that the SUS substrate flat plate shape sensor has sufficient performance in temporal resolution, measurement noise and temperature durability against requirements. Secondly, a plug shape sensor using an AC8A substrate was produced to be introduced to an engine. The heat from the sensor sidewall has to be taken into account due to the small size of the plug shape sensor, the analytical model for the heat flux calculation was extended to a two dimensional cylindrical system. Heat flux measurement tests under high load conditions with the plug shape sensor were conducted in a rapid compression and expansion machine. As a result, the sensor endured the harsh environment with the maximum pressure of 9.1 MPa and the heat flux load of 8.9 MW/m2. Furthermore, the measurement noise was estimated to 11.0 kW/m2, which was a quite low level compared with a commercially available heat flux sensor. Although the issue in the fabrication process remains, the prospects for introducing the MEMS heat flux sensor in internal combustion engine were obtained.