3 0 0 0 OA 電解研磨によるタングステン探針製作における再現性向上
- 著者
- 高橋 健 早瀬 仁則 初澤 毅
- 出版者
- 一般社団法人 電気学会
- 雑誌
- 電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
- 巻号頁・発行日
- vol.120, no.4, pp.156-161, 2000-03-20 (Released:2009-04-01)
- 参考文献数
- 8
- 被引用文献数
- 1
A fabrication process of tungsten probes for surface profile measurements has been improved. The probe contour is designed to have an optimum shape for the use of tapping stylus. An improved DC electropolishing is applied for the elimination of surface impurities and smaller stylus radius with exponential contour, which uses an electrical flushing and a surface tension control of the electrolyte. The process is experimentally confirmed to have advantages for the fabrication of the stabilized stylus contour, typically with a stylus radius of 30nm. They have smoother contours compared with those fabricated by AC electropolishing.
2 0 0 0 OA 投影像の明暗解析によるガラスの表面うねり形状の測定
- 著者
- 楜澤 信 城山 厚 早瀬 仁則 初澤 毅
- 出版者
- 公益社団法人 精密工学会
- 雑誌
- 精密工学会誌 (ISSN:09120289)
- 巻号頁・発行日
- vol.67, no.7, pp.1096-1100, 2001-07-05 (Released:2009-04-10)
- 参考文献数
- 8
This paper proposes a method to measure surface profiles of flat glasses by using a shadow image generated by the surface corrugations. When a point light is projected to a screen through the glasses, surface corrugations work as lenses to modulate contrast on the screen. Peaks on the glass surface give brighter regions and valleys gives darker regions, so brightness profiles on the screen agree to surface profiles. Contrasts of shadow images are predicted by an optical theory and lens model of surface profiles. The predictions agree to experiments for various optical positioning and installation angle. High contrast profiles of shadow images do not always give high similarity to the surface profiles because of the blur for too strong lens effect and resolution limit. On an allowable condition, three samples are measured whose surface profiles have peak-to-valley corrugation of 10-65 nm. For each sample, both surface profiles and brightness profiles give similar waveforms. An error of 5 nm is defined from the difference between both profiles for a pitch of 1 mm. This simple method can be applied to measure the surface profiles of flat glass with high accuracy.
1 0 0 0 精密工学を応用したバイオデバイス製作
- 著者
- 初澤 毅 栁田 保子
- 出版者
- 公益社団法人 精密工学会
- 雑誌
- 精密工学会誌 (ISSN:09120289)
- 巻号頁・発行日
- vol.80, no.4, pp.365-368, 2014
1 0 0 0 OA 精密工学を応用したバイオデバイス製作
- 著者
- 初澤 毅 栁田 保子
- 出版者
- 公益社団法人 精密工学会
- 雑誌
- 精密工学会誌 (ISSN:09120289)
- 巻号頁・発行日
- vol.80, no.4, pp.365-368, 2014-04-05 (Released:2014-04-05)
- 参考文献数
- 8