著者

石川 豊 齋藤 駿介 及川 朱

出版者

一般社団法人 表面技術協会

雑誌

表面技術 (ISSN:09151869)

巻号頁・発行日

vol.72, no.9, pp.499-502, 2021-09-01 (Released:2021-09-02)

参考文献数

13

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This study examined growth of single-walled carbon nanotubes (SWCNTs) by hot-filament chemical vapor deposition at low temperatures using a double-layer film consisting of iron and cobalt layers as a catalyst. Ethanol was used as the carbon source. At a 350 ℃ growth temperature, few SWCNTs were grown when only cobalt film was used as the catalyst, although SWCNT growth was confirmed when a double-layer film consisting of iron and cobalt layers was used as the catalyst. The optimal combination for use as the catalyst is iron oxide in a layer (thickness before oxidation, 1.2 nm) on the cobalt oxide in a layer (thickness before oxidation, 1.0 nm). By reduction of these films at 400 ℃ for 30 min, followed by CNT growth at 350 ℃ for 30 min, a vertically aligned SWCNT film with 3.2 μm thickness was obtained.