著者

安崎 利明

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.26, no.11, pp.700-703, 2005-11-10 (Released:2007-08-09)

参考文献数

5

被引用文献数

1

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For large area coating of architectural glass work with excellent quality and performance of self-cleaning, the sputtering method is suitable for the thickness uniformity and the appearance. Usage of a seed layer is illustrated to form the anatase structure of TiO2. The coating shows the good photo-activity and the excellent self-cleaning performance. This seed layer effectively makes the incomparable lattice matching to the anatase TiO2. Finally, it was found that the double side sputtering with high performance LowE coating is real process when the seed layer is utilized.

著者

安崎 利明

出版者

日本表面科学会

雑誌

表面科学 = Journal of The Surface Science Society of Japan (ISSN:03885321)

巻号頁・発行日

vol.26, no.11, pp.700-703, 2005-11-10