著者

河田 洋

出版者

日本加速器学会

雑誌

加速器 (ISSN:13493833)

巻号頁・発行日

vol.15, no.3, pp.126-131, 2018-10-31 (Released:2021-10-05)

参考文献数

17

被引用文献数

2

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It is essential to develop the high power EUV light source up to 1 kW to realize the 3 nm node to reduce stochastic variation and achieve higher throughput. To this end, our group has proposed an energy recovery linac (ERL)-based free electron laser (FEL) which will produce more than 10 kW EUV light to provide the light into several scanners. This article describes the present status of the EUV Lithography which is a starting point of HVM, and the future prospect of a high power EUV-FEL light source based on ERL accelerator technologies.

著者

鈴木 茂雄 河田 洋

出版者

日本結晶学会

雑誌

日本結晶学会誌 (ISSN:03694585)

巻号頁・発行日

vol.27, no.2, pp.128-138, 1985

被引用文献数

1

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Described briefly are the present status of the experimental apparatus installed at the topography station and some user experimental results. At this station, it is possible to do the real time observation using VTR recording of topographic images of crystals either by direct method (saticon TV) or by indirect method (fluorescent film+TV) . Spot indexing of the Laue pattern and quick setting of the specimen orientation by computer has been developed. Many users have done various experiments since 1982 under various environmental conditions using white synchrotron radiation from normal bending magnet (BL-15) and wiggler magnet (BL-14) . Some examples of dynamic observations of the crystal imperfection, melting or solidification phenomenon, phase transition, and wall motion of the magnetic domain are shown.

著者

笠置 延生 上田 和浩 沖津 康平 飯田 敏 杉田 吉充 阿部 孝夫 河田 洋

出版者

一般社団法人日本物理学会

雑誌

秋の分科会講演予稿集

巻号頁・発行日

vol.1990, no.2, 1990-09-12