著者

羽根 一博 奥山 賢一 佐々木 実

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.64, no.10, pp.1532-1536, 1998 (Released:2009-06-30)

参考文献数

6

被引用文献数

1 1

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With an intense thermal variation, optical encoder yields measuring error because of the generation of nonlinear strain due to the difference of the thermal expantion coefficient between a glass scale and a metallic parts of machines. In this study, a method of using a grating which is directly manufactured on a metallic surface of parts of machines is proposed. Using this method, the thermal strain is made linear and the error becomes simplified to calibrate. Furthermore, it realizes a miniaturization of the system and improves its vibration-resistance. This paper shows the process of making a grating on a metallic surface by photolithography using some methods and ascertains the sufficient performance of this scale in an optical encoder.