著者

斉藤 雄之 羽根 一博

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.58, no.2, pp.343-348, 1992-02-05 (Released:2009-10-08)

参考文献数

7

被引用文献数

1 1

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This paper describes photothermoelastic effect occurring at the IC lead's soldered joints. Irradiation of chopped LASER light on a lead frame produces flexural vibration caused by the thermoelastic bending. Conditions of soldered joints were modelled into 3 categories, that is “nomalsoldering”, “lifted leg”, “touching”. Flexural resonance was found in “lifted leg”. And the deflection of a lead frame varied according to the mechanical conditions of soldered joints, when irradiation spot position moved along the surface of a lead frame. Precise analysis of amplitude and phase of the vibration gave information on the conditions of soldered joints. In order to explain the experimental results, a calculation model was made. The thermoelastic bending was calculated under the assumption that the temperature difference existed along the thickness of the shell element. Difference between the phenomena occurring from the PT effect and the conventional photoacoustic effect were also observed through the detection of acoustic wave and optical deflection method.

著者

佐々木 実 陳俊中 エドウィン 羽根 一博

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society (ISSN:13418939)

巻号頁・発行日

vol.126, no.6, pp.241-242, 2006-06-01

被引用文献数

1

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An exposure method for realizing fine patterning on three-dimensional samples is described. Three-dimensional sample requires the different viewpoint from that of the proximity patterning. Concave areas can not be geometrically approached to the mask. The fine patterning becomes difficult due to the broadening of the exposure light. In this study, the phase shift mask is combined with the well-collimated mercury lamp. 5 μm-width line pattern is stably obtained on the 200 μm-deep cavity bottom.

著者

羽根 一博 奥山 賢一 佐々木 実

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.64, no.10, pp.1532-1536, 1998 (Released:2009-06-30)

参考文献数

6

被引用文献数

1 1

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With an intense thermal variation, optical encoder yields measuring error because of the generation of nonlinear strain due to the difference of the thermal expantion coefficient between a glass scale and a metallic parts of machines. In this study, a method of using a grating which is directly manufactured on a metallic surface of parts of machines is proposed. Using this method, the thermal strain is made linear and the error becomes simplified to calibrate. Furthermore, it realizes a miniaturization of the system and improves its vibration-resistance. This paper shows the process of making a grating on a metallic surface by photolithography using some methods and ascertains the sufficient performance of this scale in an optical encoder.