著者

佐野 陽之 水谷 五郎

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.28, no.12, pp.711-717, 2007-12-10 (Released:2007-12-16)

参考文献数

17

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We have developed optical sum frequency (SF) and second harmonic (SH) microscopy as a new surface probe. In this paper, recent three studies performed by the SF (SH) microscopy are presented. (1) The spatial distribution of electronic states of an arsenic ion implanted Si(111) substrate was observed by using a wavelength tunable SH microscope. Resonant SH images associated with Eg and E2 energy gaps were obtained at the SH photon energies of 2.33 and 4.43 eV, respectively. (2) It was demonstrated that the spatial distribution of hydrogen desorption by laser pulses from a hydrogen terminated Si surface can be observed by the SH microscope. In the case of irradiation of ultraviolet short laser pulses, the hydrogen desorption occurred above the threshold fluence of ∼40 mJ/cm2, suggesting that the hydrogen desorption probably resulted from the laser induced thermal desorption (LITD) mechanism. (3) It was demonstrated that nondestructive chemical analysis of starch granules in a water plant can be performedby using SH and SF microscopy.