著者

山中 弘次

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.35, no.9, pp.504-509, 2014-09-10 (Released:2014-09-27)

参考文献数

8

被引用文献数

3

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The definition, property, application fields and purification facilities of ultra pure water are overviewed with the recent achievements in the technologies of water recycling and reductions in chemical consumption at first. Then the ion adsorption filter for removing ppt level of ionic impurities from ultra pure water, and the functionalized ultra pure water for precision cleaning in the fields of semiconductor and flat panel displays are described as the recent achievements in ultra pure water technology.