著者

千葉 繁生 大山 恭史 播磨 和幸 近藤 和夫 篠原 邦夫

出版者

The Society of Chemical Engineers, Japan

雑誌

化学工学論文集 (ISSN:0386216X)

巻号頁・発行日

vol.22, no.2, pp.412-415, 1996-03-10

参考文献数

4

被引用文献数

1 4

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Agglomerates of 100250 μm consisting of Si<SUB>3</SUB>N<SUB>4</SUB> primary particles of 0.76 μm were made with a rotary vibrating sieve. Si<SUB>3</SUB>N<SUB>4</SUB> fine particles were coated with AlN by gas phase reaction with AlCl<SUB>3</SUB> and NH<SUB>3</SUB> in some fluidized beds of the agglomerates. The cross sectional distribution of AlN in the agglomerate was measured by EPMA analysis. As a result, uniform deposition of AlN was obtained at a relatively low reaction temperature and low gas velocity.