- 著者
-
千葉 繁生
大山 恭史
播磨 和幸
近藤 和夫
篠原 邦夫
- 出版者
- The Society of Chemical Engineers, Japan
- 雑誌
- 化学工学論文集 (ISSN:0386216X)
- 巻号頁・発行日
- vol.22, no.2, pp.412-415, 1996-03-10
- 参考文献数
- 4
- 被引用文献数
-
1
4
Agglomerates of 100250 μm consisting of Si<SUB>3</SUB>N<SUB>4</SUB> primary particles of 0.76 μm were made with a rotary vibrating sieve. Si<SUB>3</SUB>N<SUB>4</SUB> fine particles were coated with AlN by gas phase reaction with AlCl<SUB>3</SUB> and NH<SUB>3</SUB> in some fluidized beds of the agglomerates. The cross sectional distribution of AlN in the agglomerate was measured by EPMA analysis. As a result, uniform deposition of AlN was obtained at a relatively low reaction temperature and low gas velocity.