著者

川畑 州一

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.35, no.6, pp.286-293, 2014

被引用文献数

1

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Ellipsometry is widely used as a powerful tool in the research of nano-science and the thin film engineering. The thickness of the film of sub-nm order can be measured by ellipsometry with high accuracy along with its refractive index. Ellipsometry is a non-destructive method and is ambient free in the measurement. Nowadays, its applications range over a variety of field. This article describes an introduction to ellipsometry with some its applications. And the perspective of ellipsometry is also briefly summarized.