著者

川畑 州一

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.35, no.6, pp.286-293, 2014

被引用文献数

1

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Ellipsometry is widely used as a powerful tool in the research of nano-science and the thin film engineering. The thickness of the film of sub-nm order can be measured by ellipsometry with high accuracy along with its refractive index. Ellipsometry is a non-destructive method and is ambient free in the measurement. Nowadays, its applications range over a variety of field. This article describes an introduction to ellipsometry with some its applications. And the perspective of ellipsometry is also briefly summarized.

著者

川畑 州一

出版者

公益社団法人 日本表面科学会

雑誌

表面科学 (ISSN:03885321)

巻号頁・発行日

vol.35, no.6, pp.286-293, 2014-06-10 (Released:2014-06-21)

参考文献数

16

被引用文献数

1

---

Ellipsometry is widely used as a powerful tool in the research of nano-science and the thin film engineering. The thickness of the film of sub-nm order can be measured by ellipsometry with high accuracy along with its refractive index. Ellipsometry is a non-destructive method and is ambient free in the measurement. Nowadays, its applications range over a variety of field. This article describes an introduction to ellipsometry with some its applications. And the perspective of ellipsometry is also briefly summarized.