著者

原 仁 岸 直輝 岩岡 秀人

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.122, no.5, pp.274-279, 2002

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We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm<SUP>3</SUP> volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.