著者

工藤 寛之

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.135, no.5, pp.NL5_4, 2015

著者

栗山 敏秀 村上 恒夫

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.138, no.10, pp.455-460, 2018

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<p>The human error prevention system is realized by 3-point collation using a barcode reader. A new optical device consisting of Littrow prism and cylindrical lens, which are optically aligned with a built-in camera and an LED in a smartphone, has realized the smartphone with the same usability as the conventional barcode reader.</p>

著者

原 仁 岸 直輝 岩岡 秀人

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.122, no.5, pp.274-279, 2002

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We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm<SUP>3</SUP> volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.

著者

朴 鍾淏 高間 信行 藤田 博之 金 範埈

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.132, no.9, pp.303-308, 2012

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In this work, we have developed an alternative and improved &ldquo;optical softlithographic&rdquo; microfabrication method for patterning on a concave substrate as well as the fabrication of micro patterned PDMS cylindrical stamps for the potential application to nano imprinting. Firstly, we fabricated SU-8 micro patterns with high aspect ratio (over 4) on a concave glass substrate using optical softlithography, where UV light was exposed through a very flexible mask attached on the concave surface. We investigated the optimal experimental conditions depending on shapes and scales, and examined the resolutions of patterns. Next, we replicated a PDMS cylindrical stamp using SU-8 micro patterns as a mold. Intermediate female molds were made from the original cylindrical mold. Then, the stamp was made by filling the intermediate mold with PDMS monomer and solidifying it. Thus, this technique provides us with novel fabrication technique of 3D micro patterns on curved substrate as well as a cylindrical polymer stamp for roll micro contact printing.

著者

竹井 裕介 松井 亮 グェン ミン ジュン 高畑 智之 松本 潔 下山 勲

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.138, no.2, pp.54-58, 2018

被引用文献数

1

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<p>We measured flow speed of a moving object in a water with Doppler effect using a MEMS ultrasonic receiver. This measurement is aimed for non-invasive blood pressure measurement. We proposed a wide frequency range receiver to measure both blood flow speed and vessel diameter at the same time in a blood vessel. Our sensor has a piezoresistive cantilever which is put on the boundary between air and liquid in a device. According to this structure, proposed receiver can measure acoustic waves from Hz to MHz order frequency, so that we can obtain blood flow speed (MHz order), and blood pressure change (Hz order) with the same device. On this paper, we measured flow speed ranging from 64.0 to 76.3 mm/s with 5.6 to 19% error.</p>

著者

井上 聡史 高橋 巧也 久米村 百子 石橋 和徳 藤田 博之 橋口 原 年吉 洋

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.137, no.6, pp.152-158, 2017

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<p>In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm² by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.</p>