2 0 0 0 OA マイクロ光分析デバイスの開発と二酸化炭素濃度センサへの応用
- 著者
- 原 仁 岸 直輝 岩岡 秀人
- 出版者
- 一般社団法人 電気学会
- 雑誌
- 電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
- 巻号頁・発行日
- vol.122, no.5, pp.274-279, 2002 (Released:2003-03-28)
- 参考文献数
- 11
We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm3 volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.
1 0 0 0 マイクロ光分析デバイスの開発と二酸化炭素濃度センサへの応用
- 著者
- 原 仁 岸 直輝 岩岡 秀人
- 出版者
- 一般社団法人 電気学会
- 雑誌
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)
- 巻号頁・発行日
- vol.122, no.5, pp.274-279, 2002
We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm<SUP>3</SUP> volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.