著者

青山 尚之 岩崎 隆之 佐々木 彰 深谷 次助 下河辺 明

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.59, no.6, pp.1007-1012, 1993-06-05 (Released:2009-07-23)

参考文献数

9

被引用文献数

16 21

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This paper describes design, fabrication and performance of the miniature walker developed for a new precision production system. This machine consists of piezo-actuators and electromagnetic legs which are synchronized as to move like an inchworm and those elements are jointed mechanically for the machine to walk on any curved surface including a wall and a ceiling. The magnetic forces of this small machine can be remote controlled critically for preventing from slipping and falling down although conventional inchworm mechanisms need some guide rails or are restricted on a horizontal plane. This arrangement also allows the lack of mechanical elements which may provide a very high positioning resolution with a wider working area. In the experiments, our miniature machines which are the size of golf ball are fabricated and they can move on any inclined surface with continuous sub-micron steps. This results means the mini-walkers have the feasibility for applying to a new precision production system where they can cooperate with conventional machines.

著者

ホリカワ オズワルド 佐藤 海二 下河辺 明

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.57, no.12, pp.2231-2236, 1991-12-05

被引用文献数

3 2

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Reversal method is a well known method for roundness measurement. Although it is simple, it requires the reversion of the workpiece relative to the rotary mechanism. Such a reversion is impossible in some situations, for example, when the axis of the rotary mechanism itself is to be measured. In order to solve this problem, this paper proposes a new method called Improved Reversal Method (IRM), in which the reversion of the workpiece becomes unnecessary. In the IRM, an auxiliary reference (a cylindrical master) is set on a workpiece. The workpiece and the auxiliary reference are rotated and measured simultaneously. The auxiliary reference is then reversed and the measurement is repeated. By processing results of the first and the second measurements, not only roundness errors of the workpiece and the auxiliary reference, but also radial motion errors of the workpiece axis before and after the reversion can also be obtained. The effectiveness of the IRM is demonstrated by experiments in which a measurement reproducibility better than 17 nm and repeatability better than 31 nm were achieved.