著者

朴 鍾淏 高間 信行 藤田 博之 金 範埈

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.132, no.9, pp.303-308, 2012

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In this work, we have developed an alternative and improved “optical softlithographic” microfabrication method for patterning on a concave substrate as well as the fabrication of micro patterned PDMS cylindrical stamps for the potential application to nano imprinting. Firstly, we fabricated SU-8 micro patterns with high aspect ratio (over 4) on a concave glass substrate using optical softlithography, where UV light was exposed through a very flexible mask attached on the concave surface. We investigated the optimal experimental conditions depending on shapes and scales, and examined the resolutions of patterns. Next, we replicated a PDMS cylindrical stamp using SU-8 micro patterns as a mold. Intermediate female molds were made from the original cylindrical mold. Then, the stamp was made by filling the intermediate mold with PDMS monomer and solidifying it. Thus, this technique provides us with novel fabrication technique of 3D micro patterns on curved substrate as well as a cylindrical polymer stamp for roll micro contact printing.