著者

馬場 岳斉 工藤 幸寛 高橋 泰樹

雑誌

2015年 第76回応用物理学会秋季学術講演会

巻号頁・発行日

2015-07-17

著者

馬場 岳斉 工藤 幸寛 高橋 泰樹

出版者

工学院大学

雑誌

工学院大学研究報告 (ISSN:03685098)

巻号頁・発行日

no.120, pp.49-52, 2016-04-30

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Photolithography is used in various fields such as printed circuit board fabrication and semiconductor processes,and it is often adopted in science education classes. For student to make printed circuit boards which have varyingdesigns, in a classroom, efficient exposure time is required; however, this is difficult to achieve because of cost andtime limitations. In this research, we have developed mask-less exposure equipment for high quality printed boards at low costwith a short exposure time by using a commercially available DLP projector. Furthermore, this process is alsoapplicable regarding micro-patterns.