著者

Yan Ding Xiaoxin Liang Yuepeng Yan Xiao Wang

出版者

The Institute of Electronics, Information and Communication Engineers

雑誌

IEICE Electronics Express (ISSN:13492543)

巻号頁・発行日

vol.20, no.3, pp.20220526, 2023-02-10 (Released:2023-02-10)

参考文献数

30

被引用文献数

1

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A comprehensive study of air core recta-coax line (ARCL) based on MEMS surface micromachining technology is presented in this paper. The ARCL-to-semi-rectangular coaxial transmission line (SCL) ground-signal-ground (GSG) transition is proposed and designed for probe testing and integration with MMIC chips. To obtain the characteristic impedance of SCL, an equivalent model and theoretical derivation process is presented. In order to consider the effects of processing on performance, electrical effects of dielectric support strap parameters and potential fabrication issues including offset layers and over etching are investigated. For verification, the back-to-back GSG transition is fabricated and measured which has a low insertion loss of 0.13dB up to 50GHz, and a return loss better than -23dB within 5-50GHz. As an example, a demonstration of ARCL with GSG transition for MMIC chips integration is demonstrated.