著者
Jiayi Wang Yuepeng Yan
出版者
The Institute of Electronics, Information and Communication Engineers
雑誌
IEICE Electronics Express (ISSN:13492543)
巻号頁・発行日
vol.20, no.13, pp.20230179, 2023-07-10 (Released:2023-07-10)
参考文献数
33

In this study, a mechanical movable device is used to achieve a mechanical tuning phase shifter with adjustable substrate, which has a huge potentiality of tuning range. The main body of phase shifter is microstrip structure. The substrate has two layers with one movable layer. By moving the movable layer, the equivalent relative permittivity of component is changed and tunability is realized. The phase is -128.2° to 96.1° at 6GHz while the transmission coefficient S21 is from -2.09dB to -2.70dB throughout the entire tuning process. The movable layer is better to be with high relative permittivity and relative permeability to reach a wider tuning range.
著者
Yan Ding Xiaoxin Liang Yuepeng Yan Xiao Wang
出版者
The Institute of Electronics, Information and Communication Engineers
雑誌
IEICE Electronics Express (ISSN:13492543)
巻号頁・発行日
vol.20, no.3, pp.20220526, 2023-02-10 (Released:2023-02-10)
参考文献数
30
被引用文献数
1

A comprehensive study of air core recta-coax line (ARCL) based on MEMS surface micromachining technology is presented in this paper. The ARCL-to-semi-rectangular coaxial transmission line (SCL) ground-signal-ground (GSG) transition is proposed and designed for probe testing and integration with MMIC chips. To obtain the characteristic impedance of SCL, an equivalent model and theoretical derivation process is presented. In order to consider the effects of processing on performance, electrical effects of dielectric support strap parameters and potential fabrication issues including offset layers and over etching are investigated. For verification, the back-to-back GSG transition is fabricated and measured which has a low insertion loss of 0.13dB up to 50GHz, and a return loss better than -23dB within 5-50GHz. As an example, a demonstration of ARCL with GSG transition for MMIC chips integration is demonstrated.