著者

崔 成日 高橋 和也 堤 正臣 佐藤 隆太

出版者

精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.73, no.9, pp.1040-1045, 2007-09-05

参考文献数

10

被引用文献数

3 2

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This paper describes the measuring methods for positioning accuracy of tilting axes in five-axis controlled machining centers with a tilting rotary table. The top surface of the tilting rotary table is generally in higher position than the tilting axis. In this case, there is no measuring method except for a manually operated clinometer. Thus, a clinometer consisting of a precision rotary encoder and a bubble level was firstly developed. In the method, operators have to read visually the scale of the level and the reading accuracy is dependent on their ability. Instead of the bubble level, an electronic level with high resolution was employed for comparison. A ball bar equipment was also applied to measure the angular positioning accuracy of the tilting rotary table, as the ball bar equipment can measure the angular displacement continuously.

著者

福田 惠明

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.64, no.7, pp.1000-1003, 1998-07-05

参考文献数

5

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以上KrFエキシマスキャン露光装置の例からEUVスキャン露光装置のステージ関連の技術課題を概観した.EUVスキャン露光装置の問題は「レチクルステージ, ウエハステージの反力の放出とアクチュエータの放熱およびシステムの熱管理を真空チャンバをもつ系でどう実現するか」であるといっても過言ではない.<BR>EUVスキャン露光装置には大気中で使用するKrFエキシマスキャン露光装置にはない新しい課題もあり, 実際のシステムでは装置全体の統一を考えた設計が必要である.

著者

齋藤 長男

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.73, no.3, 2007-03-05

参考文献数

2

著者

青柳 誠司 藤岡 潤 石井 一久 関 啓明 神谷 好承

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.65, no.7, pp.1035-1040, 1999-07

参考文献数

12

被引用文献数

1

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Aiming at realizing off-line programming, many researches of improving robot's accuracy by calibrating the kinematic parameters of a robot are being carried out now. For an effective calibration it is necessary to measure the position of the tip of a robot arm precisely in a comparatively wide area. Although a laser tracking system is regarded as the most practical measuring system for this purpose in ISO 9283, there is no report yet which actually applies this system to the robot calibration. In this paper a 6-DOF articulated robot is calibrated by using a laser tracking system according to the joint axis estimating method and the effectiveness of this system is certified. A method of estimating the accuracy which refers to the robot base coordinate system is proposed. It is proved experimentally that the accuracy of the robot before calibration is worse than 3mm. The robot after calibration is positioned to the limited grid which is in the area near the initial pose of the calibration and to the wide grid. The accuracy in the limited grid is improved to be 0.27mm by the calibration, however the accuracy in the wide grid is worse compared with that in the limited grid. From this result it is proved that the joint axis estimating method is not so effective except for the neighborhood of the initial pose.

著者

兪 竹青 那須 康雄 中嶋 新一 水戸部 和久

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.67, no.5, pp.764-769, 2001-05-05

被引用文献数

1 1

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This paper proposes an ultrasonic position measurement system for mobile robot moving in wide-area. The system uses ultrasonic receiver net which consists of many ultrasonic receivers with wide beam (100°) allocated at a constant interval on a ceiling. The ultrasonic receiver net covers all area where mobile robot moves. And two ultrasonic transmitters with wide beam (100°) are placed at rear and front of mobile robot to transmit ultrasonic wave toward ceiling alternately. Some receivers of receiver net can receive the ultrasonic wave, so the distances between transmitters and receivers can be obtained. Three optimal distances are selected to estimate the positions of the transmitters, and the posture of the mobile robot is estimated by the positions of the two transmitters. Theoretical analysis and experimental results show that the estimated position measurement error is φ 62mm and estimated posture error is ±4°. The ultrasonic receiver net can be expanded easily, making possible to measure position of a mobile robot moving in wide-area, especially in bad visible environment.