- 著者
-
井上 聡史
高橋 巧也
久米村 百子
石橋 和徳
藤田 博之
橋口 原
年吉 洋
- 出版者
- 一般社団法人 電気学会
- 雑誌
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)
- 巻号頁・発行日
- vol.137, no.6, pp.152-158, 2017
<p>In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm<sup>2</sup> by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.</p>