著者
井上 聡史 高橋 巧也 久米村 百子 石橋 和徳 藤田 博之 橋口 原 年吉 洋
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)
巻号頁・発行日
vol.137, no.6, pp.152-158, 2017

<p>In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm<sup>2</sup> by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.</p>