1 0 0 0 OA 真空排気と水

著者
齊藤 芳男
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.53, no.9, pp.511-514, 2010 (Released:2010-10-26)
参考文献数
6

Some historical background concerning studies on residual water molecules in vacuum chambers and devices are introduced. The effect of adsorbed water molecules on pumping process in initial and steady state is outlined. Pumping delay time due to sojourn time of the molecule is also discussed.
著者
堀内 伸 伯川 秀樹 中尾 幸道
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.56, no.8, pp.298-302, 2013 (Released:2013-08-27)
参考文献数
13
被引用文献数
1

Electroless plating (ELP) process using Pt and Pd colloid catalyst has been developed. Au, Pt and Cu metal films with sufficient adhesion were successfully obtained without special treatment of substrate surfaces. Owing to the excellent catalytic property of the Pt nanoparticles, continuous gold thin films can be produced at room temperature using a simple cyanide-free gold electroless plating solution composed of chloroauric acid and hydrogen peroxide. Pd colloidal catalyst has been also developed for a novel Pt ELP process and for commercial Cu ELP process. The process requires no surface modifications for the immobilization of the catalyst, and by simple post-annealing the adhesion of the plated films to various polymer films can be improved dramatically. We have thus developed an environment-friendly etchingless ELP process without the use of toxic and hazardous substances.
著者
鈴木 淳 北條 久男 小林 太吉
出版者
The Vacuum Society of Japan
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.58, no.5, pp.177-180, 2015
被引用文献数
1

A novel quartz oscillator that has a temperature-stable output was investigated for outdoor hydrogen sensing. The output from the quartz oscillator remained almost constant for temperatures in the range of 15 to 50℃. Fluctuations of the output of the quartz oscillator in this temperature range were 0.3% at constant relative humidity of 0%RH, which corresponds to the change in the output when 0.3 vol% of hydrogen leaked in air. This change is thus sufficiently lower than the necessary minimum detection level of 1 vol% hydrogen concentration using the novel quartz oscillator's output during outdoor hydrogen sensing.<br>
著者
齋藤 彰 宮村 友輔 石川 陽子 村瀬 淳一 赤井 恵 桑原 裕司
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.52, no.4, pp.218-223, 2009 (Released:2009-05-29)
参考文献数
29
被引用文献数
3

Conspicuous metallic blue of Morpho butterflies is well known and attract interest because it is a brilliant luster of natural beings. The blue is produced by their proteins, which are almost transparent without pigment. The origin of the coloration with high reflectivity (>~60%) is then attributed to an interference effect based on a periodic structure. However, the interference contradicts the blue that is maintained in too wide angular range (>±40° from the normal). This mystery has recently been explained with a specific multilayer, which is a fine combination of regular and random structures at nanometer scale. We proved this hypothesis successfully by emulating the 3D structures by deposition of multilayer film on a nano-patterned substrate. Such artificial structural color can be applied to various industries, because it makes colors qualitatively impossible by pigment, and resistant to fading due to chemical change over longtime. Also we developed a high throughput nano-patterning process by use of nano-imprinting method, and succeeded in controlling the optical properties both in angular and wavelength distribution.
著者
鈴木 亜嵐 小林 清輝
出版者
The Vacuum Society of Japan
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.57, no.5, pp.197-199, 2014

We investigated the influence of the work function of metal gate electrodes on the current component induced by exposing silicon nitride-silicon oxide double-layer films to high-energy ultraviolet (UV) illumination. Prior to UV exposure, the conduction current under negative gate bias through an aluminum-nitride-oxide-silicon structure was larger than that through a mercury-nitride-oxide-silicon structure. In these structures under negative gate bias, it has been considered that electrons injected from the metal electrodes into the nitride films dominate the conduction current. Hence, the experimental result can be explained by the notion that the probability of electron injection into the nitride film from the aluminum electrode is higher than that from the mercury electrode because of the difference of the work function between the two kinds of metals. After UV exposure, the conduction current under negative gate bias through both the structures were almost identical to each other. This result reveals that the current component after exposure to UV illumination is dominated by charge carriers generated in the bulk of the nitride film.<br>
著者
有賀 哲也 八田 振一郎
出版者
日本真空協会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.52, no.11, pp.577-581, 2009
被引用文献数
3

Recent studies on the Rashba effect on surfaces are reviewed. The Rashba effect refers to the k-dependent spin splitting of valence bands due to spin-orbit coupling in two-dimensional systems under out-of-plane electric field. After the physical mechanism of the Rashba effect is briefed, experimental and theoretical studies since the surface Rashba effect was first demonstrated for Au(111) in 1996 are surveyed with an emphasis placed on the microscopic origin of the giant Rashba spin splitting on surfaces covered with monolayer films of heavier elements. Most recently, giant Rashba spin splitting was realized on the surface of semiconductors, which serves a possibility of spintronic application of the surface Rashba effect.