著者
村上 俊一 石田 哲夫 林 義孝
出版者
公益社団法人 日本表面科学会
雑誌
表面科学 (ISSN:03885321)
巻号頁・発行日
vol.3, no.3, pp.125-127, 1982-09-01 (Released:2009-11-11)

The MBE apparatus has progressed rapidly in the last two years, leading to the appearance of high performance device based on the MBE method. The recently developed MBE apparatus is described and, also, the history and the futuretrends of such systems.