著者
黒河 明
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.56, no.8, pp.307-314, 2013 (Released:2013-08-27)
参考文献数
61
被引用文献数
1 1

Surface-treatment methods using ozone, such ozone gas treatment with UV light irradiation, immersion in ozone diluted water, and exposure to ozone gas are discussed herein. The objectives of performing ozone surface treatments are to reduce carbon-related contamination on the surface, prepare a clean substrate surface to fabricate a thin-film stacking with sharp interfaces, oxidize a surface to form high-quality oxide thin films, and passivate a metal surface to increase its corrosion resistance. These objectives are achieved because of the high oxidation ability of the ozone molecules and the oxygen radicals resulting from the ozone dissociation. Various applications of ozone surface treatment are also exemplified in this report to reveal their significant potential as surface-treatment tools.
著者
市村 正也
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.58, no.8, pp.273-281, 2015 (Released:2015-09-04)
参考文献数
5
被引用文献数
3

The purpose of this article is to provide an introduction to vacuum science and technology for absolute beginners. The kinetic theory of gases is briefly described in the initial introductory part. The body of this article is divided into three parts. The first part deals with vacuum pumps. The operation principles are explained for several popular types of vacuum pumps. The second part deals with vacuum gauges. The operations of commonly used vacuum gauges are discussed. The third one deals with vacuum-tight connection with tubes and flanges. Throughout the text, basic concepts and technical terms are explained so that the text can be easily understood even by very beginners. Caution points for using vacuum systems are also given.
著者
田村 和宏 大熊 春夫 高野 史郎 正木 満博 持箸 晃
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.54, no.3, pp.155-157, 2011 (Released:2011-05-17)
参考文献数
2
被引用文献数
1

Radiation shields are required in beamlines (BL) that transport synchrotron radiation (SR) to stop high energy radiation that is scattered by instruments upstream of a BL. Radiation shields guarantee radiation safety in the downstream of the BL and need to be installed in the vacuum system of the BL. In order to limit the opening against unnecessary scattered radiation and to keep the effective aperture for SR as large as possible, a new type of radiation shield, which utilizes tungsten alloy with an opening as an ultra-high vacuum chamber, has been developed.
著者
小倉 正平
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.57, no.6, pp.219-226, 2014 (Released:2014-06-25)
参考文献数
40

Thermal desorption spectroscopy (TDS) is an important technique for investigation of adsorption, absorption, and desorption behaviors of atoms and molecules on surfaces. We briefly summarize the general procedure of TDS in surface science studies, and then we introduce our recent study of hydrogen transport across a Pd-Au alloy surface measured by TDS as an example. By combining the TDS data with other surface analysis, we found that hydrogen penetrates and desorbs through a site related to surface Pd atoms. We also demonstrate a molecular cap effect of CO, where a small amount of CO adsorption greatly changes the hydrogen absorption and desorption behavior by blocking the entrance and exit site.
著者
中田 俊武 松下 保彦 古賀 和幸 上田 康博 上谷 高弘 藤川 好晴 山口 隆夫 新名 達彦
出版者
一般社団法人 日本真空学会
雑誌
真空 (ISSN:05598516)
巻号頁・発行日
vol.32, no.11, pp.797-800, 1989

4H形SiC基板結晶上に液相成長法を用いて, 脚接合を形成し, 青紫色LEDを試作した。発光ピーク波長及び半値輻はそれぞれ420nm, 40nmであり, 発光色は澄んだ青紫色であつた.この青紫色LEDは, 標準光源などの発光デバイスとしての利用とともに, 小型・軽量で使い易い高エネルギー光源としての応用も可能であろう.今後の課題は, 光度を上げること, あるいは結晶多形の制御を確実にして他の多形の混在を防ぐ技術の開発であろう.また, 4H形単結晶では不純物の制御によっては, より短波長 (400nm以下) 発光のLEDの得られる可能性があり, これらの研究を進めていくことも重要であろう。
著者
上原 洋一 潮田 資勝
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.51, no.12, pp.796-800, 2008 (Released:2009-01-15)
参考文献数
21

Scanning tunneling microscope (STM) light emission spectroscopy provides a powerful tool for characterization of individual nanometer scale structures on solid surfaces. However, the light to be detected is usually very weak. It is desirable to improve the intensity level for measurements with good signal-to-noise ratio. For this purpose the role that the STM tip-sample gap plays in the light emission is analyzed by the dielectric theory of STM light emission. Based on the theoretical predictions, we discuss how one can obtain strong STM light emission and problems associated with the enhancement of emission.
著者
齊藤 芳男 高橋 竜太郎
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.54, no.12, pp.621-626, 2011 (Released:2012-01-12)
参考文献数
10
被引用文献数
2 4

The LCGT (Large-scale Cryogenic Gravitational wave Telescope) is an interferometer of 3-km long baseline, using a laser beam of 1064-nm wavelength. The entire system of the interferometer is to be operated in a vacuum for avoiding any noises caused by in-space molecules and adsorbed molecules on the mirrors. The beam tubes of 3 km long and 800 mm in diameter are to be kept in the order of 10−7 Pa so as to reduce scattering-effects due to residual gas molecules. In April 2011, production of 484 of unit tubes of 12 m long and 800 mm in diameter, having a flexible bellows and flanges, were started. In this report, the production process of the unit tubes is described concerning surface treatment for outgas reduction.
著者
柳内 克昭 平田 京 石田 洋一
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.55, no.5, pp.220-225, 2012 (Released:2012-06-20)
参考文献数
26

With the increase in the recording density of hard disk drives, the narrower magnetic pole and read-sensor widths in writing and reading heads are required, and techniques used for the magnetic behavior analysis in a nanoscale area is essential. The observation of the in-plane domain structure of the writer pole for a perpendicular recording (PMR) head was performed by electron holography in order to elucidate the mechanism of the pole erasure originating from the instability of the magnetic domain state. The results revealed that the stability of the domain structure is strongly related to the domain wall trapping, and the pole erasure can be suppressed by realizing the stable domain structures. With respect to a current perpendicular to plane (CPP)-giant magneto-resistive (GMR) head, which has been promising candidates of a next-generation reading head element, the insertion of non-magnetic materials, such as Cu, between the ferromagnetic pinned and free layers is known to increase the MR ratio. For realizing the practical use of the CPP-GMR head, effects of the insertion of materials on the increase in the MR ratio were investigated by X-ray magnetic circular dichroism (XMCD). The results revealed that XMCD is a powerful technique to obtain information on electronic states and magnetic moments with the help of the theoretical electronic band calculation. The potential application of secondary cantilever resonance magnetic force microscopy and spin-polarized scanning electron microscope to the in-situ magnetic imaging of PMR heads will be also discussed.
著者
小林 啓介
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.56, no.9, pp.365-376, 2013 (Released:2013-09-28)
参考文献数
35
被引用文献数
1

Hard X-ray photoelectron spectroscopy (HXPES) has developed to be used in wide ranges of solid state science and technology due to its much larger information depth comparing to the conventional X-ray photoelectron spectroscopy. It enabled to investigate buried layers as deep as more than 20 nm from the surface. Here in this article, various applications of HXPES to the deep layer investigations including chemical state profiling by takeoff angle dependence measurements and standing wave methods, intermixing analysis of metal multilayers, analysis of band bending at the semiconductor hetero interfaces, analysis of 2 dimensional carriers in strongly correlated materials interfaces, electronic structure observations at buried layers and their interfaces in devices. Laboratory HXPES system with monochromatic Cr Kα X-ray excitations is also introduced with its applications to Si MOS gate stack model samples including interface state spectroscopy by electric field application are also introduced.
著者
内橋 隆 プニート ミシュラ
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.57, no.9, pp.324-331, 2014 (Released:2014-09-30)
参考文献数
45

After a brief introduction of the spin-polarized scanning tunneling microscopy (SP-STM), its measurement techniques are described based on our recent experimental results. We have observed anomalously high spin contrast for epitaxially grown Mn(001)/Fe(001) samples. This phenomenon can be attributed to a single atom or a cluster of Mn attached to the apex of the thin film Fe tip. This interpretation is supported by a recent first-principle calculation of model magnetic tips. These results stress the importance of the identification of the magnetic tip and its precise control at an atomic level for the purpose of SP-STM measurement.
著者
楊 金峰 菅 晃一 近藤 孝文 室岡 義栄 成瀬 延康 吉田 陽一 谷村 克己 浦川 順治
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.55, no.2, pp.42-49, 2012 (Released:2012-03-28)
参考文献数
24
被引用文献数
2 5

Two ultrashort electron-bunch photocathode RF guns in picosecond (ps) and femtosecond (fs) time region are reviewed. The ps gun was developed and used successfully to generate an ultralow-emittance and high-charge electron beam with normalized emittance of 1.2 mm-mrad at bunch charge of 1 nC. The low-emittance electron beam has been used successfully to produce a 100-fs high-charge electron single bunch with a booster linear accelerator and a magnetic bunch compressor. An ultrafast pulse radiolysis with time resolution of 240 fs was constructed using the fs electron beam for the study of ultrafast reactions in radiation chemistry and biology. The fs gun, developed under the KEK/Osaka University collaboration with a new structure cavity and many improvements, was succeeded in producing directly a near-relativistic 100-fs electron beam with energy of 1-3 MeV. Femtosecond time-resolved electron diffraction has been constructed using the fs RF gun for the study of photon-induced phase transition in materials. Some experimental results of pulse radiolysis and MeV electron diffraction in fs time region were reported and discussed.
著者
加藤 景子 北島 正弘
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.53, no.5, pp.317-326, 2010 (Released:2010-06-10)
参考文献数
70
被引用文献数
1 2

Carbon nanotubes have potential to make breakthrough achievement in nano-electronics, photonics, and ultrafast devices. We report real-time observations of coherent phonons in aligned single-walled carbon nanotubes through the time-resolved reflectivity measurements with sub-10 fs laser pulses. In the isotropic reflectivity measurements, we observe the radial breathing modes, G and even D modes, while in the anisotropic reflectivity measurements, only the G mode appears. A complex polarization dependence of the G band phonon amplitude in the isotropic reflectivity indicates the superposition of G band phonons with different symmetries.
著者
仲村 亮正 文 相喆 藤嶋 昭
出版者
一般社団法人 日本真空学会
雑誌
真空 (ISSN:05598516)
巻号頁・発行日
vol.49, no.4, pp.232-237, 2006 (Released:2007-04-12)
参考文献数
28
被引用文献数
1 1
著者
山本 貴博 小鍋 哲
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.57, no.12, pp.457-460, 2014 (Released:2014-12-26)
参考文献数
38
被引用文献数
1

We give a brief review of thermal transport and thermoelectric properties of graphene and related materials. The thermal conductivity of graphene is extremely high (3,000-5,300 W K−1 m−1) because of strong carbon-carbon bonds and long mean free path of phonons. On the other hand, the thermoelectric coefficients (Seebeck coefficient and Nernst coefficient) are powerful tool for probing the electron scattering mechanism and Dirac fermion features of graphene and related materials.
著者
小野 寛太
出版者
一般社団法人 日本真空学会
雑誌
Journal of the Vacuum Society of Japan (ISSN:18822398)
巻号頁・発行日
vol.59, no.12, pp.346-351, 2016 (Released:2016-12-23)
参考文献数
7
被引用文献数
1

Scanning transmission x-ray microscopy (STXM) is a unique measurement technique to perform nanoscale x-ray spectroscopy. In this review, we briefly introduce soft x-ray spectroscopy and microscopy technique, and also describe recent results on magnetic imaging and nanoscale x-ray circular dichroism spectroscopy on magnetic materials using STXM.