- 著者
-
石川 豊
齋藤 駿介
及川 朱
- 出版者
- 一般社団法人 表面技術協会
- 雑誌
- 表面技術 (ISSN:09151869)
- 巻号頁・発行日
- vol.72, no.9, pp.499-502, 2021-09-01 (Released:2021-09-02)
- 参考文献数
- 13
This study examined growth of single-walled carbon nanotubes (SWCNTs) by hot-filament chemical vapor deposition at low temperatures using a double-layer film consisting of iron and cobalt layers as a catalyst. Ethanol was used as the carbon source. At a 350 ℃ growth temperature, few SWCNTs were grown when only cobalt film was used as the catalyst, although SWCNT growth was confirmed when a double-layer film consisting of iron and cobalt layers was used as the catalyst. The optimal combination for use as the catalyst is iron oxide in a layer (thickness before oxidation, 1.2 nm) on the cobalt oxide in a layer (thickness before oxidation, 1.0 nm). By reduction of these films at 400 ℃ for 30 min, followed by CNT growth at 350 ℃ for 30 min, a vertically aligned SWCNT film with 3.2 μm thickness was obtained.