著者
涌井 伸二
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.73, no.4, pp.405-409, 2007 (Released:2010-01-12)
参考文献数
12
被引用文献数
8 6
著者
涌井 伸二
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.60, no.2, pp.211-214, 1994-02-05 (Released:2009-06-30)
参考文献数
4
被引用文献数
1 1

The positioning mechanism can be regarded as a simple vibration system with one degree of freedom. Generally speaking, it is difficult to identify the physical parameters of this mechanism without decomposing. In this paper, an identification method of physical parameters for positioning mechanism is described. Firstly it is shown that the viscous damping of slide mechanism can be derived by measuring the frequency response from the collocated sensor to the non-collocated sensor. Moreover, the spring constant between the mechanisms also can be derived more accurately in comparison with the value based on the impulse response. Secondary the equivalent viscous damping is calculated by means of the constant velocity test or the frequency response. Then the viscous damping of rotational mechanism may easily be derived by subtracting the converted viscous damping, which is the value of slide mechanism at the position of motor axis, from the equivalent viscous damping. Finally, the proposed identification method is applied to an actual positioning mechanism.
著者
赤津 観 涌井 伸二
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌D(産業応用部門誌) (ISSN:09136339)
巻号頁・発行日
vol.127, no.11, pp.1171-1179, 2007-11-01 (Released:2007-11-01)
参考文献数
10
被引用文献数
8 19

This paper proposed a calculation method of the torque and power density especially for the fractional-slot concentrated winding machines. The torque coefficient and the inductance coefficient to transform from m-slot/n-pole machine to 3-phase/2-pole machine are used. Some machines were designed and these torque densities and power densities are compared. Experimental results showed the effectiveness of the proposed calculation method and have good accordance with both calculation results and FEA results.
著者
涌井 伸二
出版者
一般社団法人 日本機械学会
雑誌
日本機械学会論文集 C編 (ISSN:03875024)
巻号頁・発行日
vol.65, no.636, pp.3252-3259, 1999-08-25 (Released:2008-02-26)
参考文献数
5
被引用文献数
1 1

The precise positioning stage is ordinary mounted on the isolated table. For the positioning of its stage, PID compensator is widely used. There are many PID tuning methods, such as the ultimate sensitivity method. However, these methods are effectively applied to the plants described by "first-order lag+dead time". Then, it is difficult to realize the desirable positioning for the stage mounted on the isolated table by the simple applying of these method. Therefore, the knowledge based adhoc parameter tuning has been carried in the production field. However, this tuning easily introduces the tradeoff between the command and disturbance responses and then an adequate compromise is required. In this circumstances, we have doubts whether absolute positioning ability inherent in the stage itself is actively used. In this paper, in order to progress the positioning performance of the stage, we try to derive the tuning formulas based on Kitamori's method. The command and disturbance designated formulas are derived. Through the numerical simulation, it is clear that the practical formulation can be derived.
著者
赤津 観 御供 頌弘 涌井 伸二
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society (ISSN:09136339)
巻号頁・発行日
vol.128, no.2, pp.125-130, 2008-02-01
参考文献数
11

This paper proposes a speed and position estimation methods by using a Hall effect sensor. The speed is estimated from the fluctuated current which can be observed on the control axis. The position is estimated from the estimated speed and is corrected from the pulse which is generated by the Hall effect sensor mounted on the machine. Although the speed control range is limitted since this method is based on the back EMF, the speed and the position can be estimated without any motor parameter is used. The prposed method is verified by the experiments which 120W SPMSM is used for the tested machine, the currnet control and the speed control results including the controlable speed range are breifly explained.
著者
森田 一弘 涌井 伸二
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌
巻号頁・発行日
vol.83, no.6, pp.579-584, 2017

This paper proposes an eccentricity computation algorithm using the complete elliptic integral of the second kind for a pre-aligner. A CD-SEM is an inspection tool of the semiconductor device using the electron beam. Highly precision CD-SEM is required by the high integration of the semiconductor device progressing. Also, high throughput CD-SEM is required by the increased production of semiconductor devices which are smaller and thinner, because they are required by growing of smartphones and tablet PCs. A pre-aligner which is installed to improve throughput is a part of CD-SEM. The pre-aligner computes eccentricity of a Si wafer, and transfers it to inside the CD-SEM precisely. It is a non-contact type which can prevent contamination using a line image sensor to compute eccentricity. However, it is difficult for a conventional method to be highly precise, because it depends on an approximation and an experience even though it computes eccentricity using derivative and statistics calculation. At first, this paper shows that a wave pattern of the line image sensor is proportional to the complete eccentric integral of the second kind based on geometry analysis. Then, it proposes highly precise eccentricity calculation algorithm based on an analytical result. Finally it shows high precision pre-aligner by an experimental result.
著者
青木 ゆうい 涌井 伸二
出版者
一般社団法人 日本機械学会
雑誌
日本機械学会論文集 (ISSN:21879761)
巻号頁・発行日
vol.84, no.862, pp.18-00052, 2018 (Released:2018-06-25)
参考文献数
11
被引用文献数
1

In this paper, it is confirmed that natural frequency of isolated table is operated and that degeneration, which means that some natural frequencies have the same value, has a bad influence. Pneumatic anti vibration apparatuses (AVAs) support that loaded devices, i.e., XY stages, operate accurately. However, many strict design conditions are imposed on AVAs with six degrees-of-freedom (DOF) which are used on manufacturing floor. There is a risk that the natural frequency of each motion mode approaches, in other words, that isolated table falls into degeneration. This disturbs accurate operations of XY stages. In this paper, AVA with two DOF is used to simplify motion instead of six DOF. First, it is stated that mode control is used to pressure control. Next, position differential feedback (PFB) is proposed. PFB, which is used to the natural frequency control, is applied for each mode. This means that air spring stiffness is considered as each motion mode, and these are deleted or given. It is shown that the natural frequency of each mode can be controlled individually, by calculation, simulation, and experiment. Finally, the degeneration is reproduced to AVA with two DOF by PFB. At this moment, acceleration control which effects to nearby the natural frequency interferes with each other mode. From these results, conclusions are the following: degeneration should be avoided, and mode PFB is effective to control natural frequency of each motion mode. In addition, mode PFB accomplishes not only avoiding degeneration, but also lowering the natural frequency.
著者
髙木 山河 涌井 伸二
出版者
一般社団法人 日本機械学会
雑誌
日本機械学会論文集 (ISSN:21879761)
巻号頁・発行日
vol.84, no.862, pp.18-00043, 2018 (Released:2018-06-25)
参考文献数
10
被引用文献数
1

In the field of precision positioning such as semiconductor exposure apparatus, weak disturbance vibration from the floor influences processing accuracy. In recent years, as the precision of the device increases, the vibration allowance value becomes more severe, and performance improvement of the vibration isolator is required. In order to improve the performance, there are researchs reducing natural frequency by the frequency characteristics of the vibration transmissibility from the floor to the vibration isolator. Reducing natural frequency and decreasing stiffness are equivalent, and main target was stiffness generated by compressed air of air spring. In addition, rubber bellows of air spring is also targeted for further performance improvement. We already proposed a method combining the two stiffness separately decreasing method. However, decreasing stiffness simultaneously destabilized the device, then it could not be completely decreased. In this paper, as a new stabilization method, stiffness is completely decreased only in the operation frequency band. Since the low frequency has positive rigidity, the localization is maintained. We demonstrated the reducing natural frequency by the experimental result. When stiffness was completely decreased, the servo stiffness which had not been focused in the past became dominant in determining the natural frequency. Therefore, an appropriate design of the servo stiffness is required for further reducing natural frequency. To satisfy this requirement, we calculated the relationship between natural frequency and servo stiffness and gave an index for appropriate design.
著者
田中 椋也 涌井 伸二
出版者
一般社団法人 日本機械学会
雑誌
日本機械学会論文集 (ISSN:21879761)
巻号頁・発行日
vol.84, no.861, pp.17-00424-17-00424, 2018 (Released:2018-05-25)
参考文献数
10
被引用文献数
3

This paper considers the implementation of a cascade type PIS compensator for the pneumatic anti-vibration apparatuses (AVA) control system. In precedence research the parallel type PIS compensator was used. This is composed of a PI and S compensators connected in parallel. However a PIS compensator is interpreted as a special case of what is used in repetitive control. In this case, a cascade connected compensators is used. According to this, the PIS compensator should be in series type. Also, parallel type PIS compensator generates swing of the output signal. Through above problems, cascade type PIS compensator is considered. However, the AVA control system with the compensator causes collision and steady-state deviation. In order to resolve these problems, we improve the structure of the compensator and its switching method. This experimental result shows that the normal operation of the AVA control system with cascade type PIS compensator. From the above, we show that the implementation of cascade type PIS compensator for the AVA control system.
著者
柏崎 翔 涌井 伸二
出版者
一般社団法人 日本機械学会
雑誌
日本機械学会論文集 (ISSN:21879761)
巻号頁・発行日
vol.83, no.854, pp.17-00189-17-00189, 2017 (Released:2017-10-25)
参考文献数
24
被引用文献数
7

Pneumatic anti-vibration apparatus (AVA) has been used for suppressing the vibration from the floor. Compressed air produced by the air compressor is supplied to air spring, which is used as an actuator in AVA. This paper considers the suppression of flow disturbance, which is caused by pressure variation of compressed air. Based on the internal model principle, the suppression of vibration of AVA due to flow disturbance has been confirmed by using Central Pattern Generator (CPG) in parallel with a displacement controller. In biological study, CPG in bodies playing a significant role in the walking have been learned. Moreover, mathematical models of CPG have been reported, and some researchers have been studying about walking of biped-robots by using CPG to generate desired value. On the other hand, this paper proposes asymmetric CPG as new model for further vibration suppression, compared with the symmetric CPG which is the conventional model. This new model introduces asymmetry by changing its parameters into different values in order to improve reproducibility of waveform which shows the variation of supplied air pressure. Validity of the proposed model is presented by experimental result of AVA. The effectiveness is shown by analyzing and comparing the results of experiment and simulation of symmetric and asymmetric CPGs.
著者
涌井 伸二
出版者
一般社団法人日本機械学会
雑誌
日本機械学会論文集. C編 (ISSN:03875024)
巻号頁・発行日
vol.63, no.612, pp.2693-2700, 1997-08
参考文献数
11
被引用文献数
7

The piezo element as a representative displacement type actuator elicits a high-speed response in comparison with the electromagnetic motor. Recently, there has been much research carried out using this feature. However, most of the studies are aimed at realizing higher precision, while there is very little research regarding high-speed. When the positioning mechanism is given, improvement of the positioning performance is entrusted to the feedback loop. At this point, we expect that some methods are prepared in order to improve the positioning performance, because an optimal method can be selected under an actual constrained condition. When we try to realize higher positioning via the feedback loop, we can enumerate technical items, such as realization of the high-speed drive amplifier, optimal tuning of the compensator, and the tuning degree of freedom extension by adding a minor loop. In this paper, these engineering techniques are summarized.
著者
中村 幸紀 野口 裕喜 涌井 伸二
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌C(電子・情報・システム部門誌) (ISSN:03854221)
巻号頁・発行日
vol.134, no.9, pp.1182-1190, 2014 (Released:2014-09-01)
参考文献数
23
被引用文献数
1

This paper considers the compensation of flow disturbance, which is the variation of air pressure supplied by the air compressor of pneumatic active anti-vibration apparatuses (AVAs). Since the air pressure varies periodically, repetitive control is utilized for the suppression of the vibration induced by the flow disturbance. As the constant gain of the repetitive controller increases, disturbance compensation is improved further. On the other hand, when the gain becomes large, transmissibility increases in the frequency region including the mechanical resonance of AVAs. It leads to the performance degradation of the vibration isolation. In order to overcome the trade-off between the disturbance compensation and the transmissibility, a notch filter is employed instead of the constant gain in the repetitive controller. The center frequency of the filter is set to the frequency region including the mechanical resonance of AVAs so as to avoid the increase of the transmissibility. By using the proposed method, the performance of disturbance compensation can be improved without increasing the transmissibility. Furthermore, effects of parameters for the notch filter are investigated. Experimental and simulation results show that the performance of flow disturbance suppression and the transmissibility of the AVA are almost same regardless of parameters in the notch filter.
著者
工藤 高裕 高橋 康弘 高松 巌 涌井 伸二
出版者
公益社団法人日本磁気学会
雑誌
日本応用磁気学会誌 (ISSN:18804004)
巻号頁・発行日
vol.30, no.3, pp.413-417, 2006-05-01

This paper describes a robust design for a capacitance-drive-type linear electromagnetic solenoid (LES) using a quality engineering method and an exclusive dynamic analysis simulator. Reducing the variation in the performance significant by restrains the rise time of the current in the electromagnetic coil. In addition, the current should be kept above a specified level for a certain period. For this purpose, it is important to increase the inductance of the electromagnetic coil. In other words, it is necessary to increase the winding diameter and reduce the number of turns in order to reduce the variation in the performance. The validity of this robust design has been verified by experiments with actual solenoids. Consequently, it provides a high yield ratio.