- 著者
- 
             
             中薮 俊博
             
             森 基
             
             滝田 敦夫
             
             岡路 正博
             
             今井 秀孝
             
          
- 出版者
- 公益社団法人精密工学会
- 雑誌
- 精密工学会誌 (ISSN:09120289)
- 巻号頁・発行日
- vol.61, no.2, pp.253-257, 1995-02-05 
- 参考文献数
- 3
- 被引用文献数
- 
             
             1
             
             
             5
             
             
          
        
        An accurate and practical system for the measurement of rolling that occurs with the movement of a machine tool unit has been developed. The system consists of a bi-prism, two plane mirrors, and a double-path optical heterodyne laser interferometer. The measurement of rolling with this system is not affected by pitching, yawing, heaving, and swaying. The measurement system was confirmed to have a sensitivity of 0.032μm/arcsec (variation of path length/unit angle of rolling), a resolution of 0.31 arcsec (used in λ/64 measurement system), and 800 mm travel length. In order to investigate the rolling that occurs in a machining centre (680 × 500 × 630 mm), the measurement was carried out in full stroke of each unit in the machining centre. The results show the reliable agreements in replication measurement.