著者

芦田 静馬

出版者

公益社団法人精密工学会

雑誌

精密機械 (ISSN:03743543)

巻号頁・発行日

vol.20, no.234, pp.325-330, 1954-09-05

著者

佐藤 運海 竹ノ内 敏一 田中 博志 若林 信一 佐藤 元太郎

出版者

公益社団法人精密工学会

雑誌

精密工学会誌論文集 (ISSN:13488724)

巻号頁・発行日

vol.70, no.12, pp.1510-1515, 2004-12-05

被引用文献数

10 6 6

---

This paper describes the elucidation about influence of dilute NaCl electrolyzed water on character of Al-Mg alloy cutting surface. First, the immersing experiment was conducted for cutting sample of Al-Mg alloy A5056B on the electrolyzed reduced water and electrolyzed oxidized water of 0.10wt% NaCl. Next, checked whether discoloration had occurred on sample surface, and analyzed the element distribution and chemical bond state on cutting surface by ASE (Auger Electron Spectroscopy) and ESCA (Electron Spectroscopy for Chemical Analysis). As results of the study, following could be identified. (1) Dilute NaCl electrolyzed water can be applied to processes, such as machining and surface treatment of Al-Mg alloy. (2) The element distribution of the Al-Mg alloy on cutting surface is controllable by dilute NaCl electrolyzed water. (3) The chemical bond state of aluminum element on Al-Mg alloy cutting surface is controllable by dilute NaCl electrolyzed water.

著者

林田 宣宏 矢向 高弘 村上 俊之 大西 公平

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.67, no.11, pp.1834-1838, 2001-11-05

参考文献数

5

被引用文献数

12 13

---

A bilateral robot is one of the remote control robots. By implementing the force feed back, it is possible for the operator to have the sense of the touch. But the force sensor is affected by unknown disturbance such as its temperature variation and so on. For that reason, it is not expected to use the force sensor at the extreme situation. In the sensorless approach, the reaction torque observer is used. But the reaction observer is easy to be influenced of the friction. This makes it difficult to estimate the external force. To address the above issue, this article proposes a twin drive system. This system is composed of two motors and one differential mechanism. It is required to control two motors for two degrees of freedom. To consider the above issue, two virtual motors are proposed. One is deal with the output control and the other is for friction compensation. The twin drive system brings a sophisticated ability to the system, which is a reduction ability of the friction. By using this system, it is possible to realize the remote control robot, where the operator can feel the obstacle which the slave robot touches. This system may help the remote control work more skillfully. The validity of the proposed method is confirmed by the experimental results.

著者

上田 隆司 花見 真司 平野 聡 山本 明

出版者

公益社団法人精密工学会

雑誌

精密機械 (ISSN:03743543)

巻号頁・発行日

vol.51, no.6, pp.1195-1200, 1985-06-05

被引用文献数

6

---

Influence of the bonding material of a diamond stick is investigated on honing performance. Three kinds of synthetic diamond sticks are used, that is, a metal bonded stick, a resinoid one and a vitrified one. For the metal bonded stick its bending strength is changed to find out the suitable bonding strength. Workpieces are alumina AI_2O_3,silicon nitride Si_3N_4 and silicon carbide SiC, which are sintered under atmospheric pressure. The results are as follows. The metal bonded diamond stick is most suitable for the effective honing of these three ceramics. In this stick, there is an advisable value of bending strength σ_b to get high productivity, namely, 120-140 MPa for AI_2O_3 and 80-100 MPa for Si_3N_4 and SiC honing, and these are less than the ordinary value 200 MPa at metal honing. This comes from necessity of creating some new cutting edges in operating. Then, the diamond grain with high toughness is recommended. Using the vitrified bonded stick and the cubic boron nitride grain is not advisable.

著者

大越 諄

出版者

公益社団法人精密工学会

雑誌

精密機械 (ISSN:03743543)

巻号頁・発行日

vol.30, no.351, pp.301-305, 1964-04-05

著者

辻 二郎

出版者

公益社団法人精密工学会

雑誌

精密機械 (ISSN:03743543)

巻号頁・発行日

vol.26, no.304, 1960-05-05

著者

鹿熊 英昭

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.71, no.11, pp.1330-1334, 2005-11-05

参考文献数

4

著者

花崎 伸作 峠 睦 宮本 猛 藤原 順介

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.56, no.12, pp.2225-2230, 1990

被引用文献数

3

---

Microcutting of AFRM (Alumina Fiber Reinforced Metal) are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of AFRM and the fracture of fibers at the plastic deformation zone of the orthogonal microcutting. Since AFRM shows an obvious anisotropic strength depending on the direction of fiber axes, cutting direction are classified by the fiber angle. Summary of the results are shown below. (1) The fracture of fibers in microcutting with carbide tool are caused by shearing, tensile and bending forces. (2) In fiber angle 30° and 60°, the direct collision of fibers with cutting edge of tool were observed with high frequency. In these cases, fibers were fractured by the shearing force. (3) In another fiber angles, fibers were fractured by the bending forces after the severe bending deformation. The amount of deformation in fibers became larger in the case of fiber angle 90° and 120° with an extensive overcut. This enhances difficulties in the exhaust of chip and worsens the surface finish. (4) The deformation zone of the orthogonal microcutting with diamond tool was found to decrease by approximately one-half comparing with carbide tool. This can be attributed to the low friction coefficient between the rake face and a sharp edge of the cutting tool. (5) Four typical cutting mechanism have been proposed by the results of the direct observation of microcutting of AFRM.

著者

藤岡 潤 青柳 誠司 石井 一久 関 啓明 神谷 好承

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.67, no.4, pp.676-682, 2001-04-05

被引用文献数

1 5

---

A 6-DOF articuiated robot (PUMA 560) is calibrated by using a taser tracking system according to the multiple positioning method and the effectiveness of this system is certified. A method which calibrates only angle parameters is newly proposed, since there is a possibility that true values of length parameters are directly measured by some other methods. The relationship between sensibility index and the number of measurement are simulated and it is inferred that 10 random measurements with fixed orientation is enough in case of calibrating only angle parameters and 20 random measurements with random orientation is enough in case of calibrating both angle and length parameters. The combination method which obtains length parameters by the joint axis estimating method and calibrates angle parameters by the multiple positioning method is experimentally developed. The accuracy of the combination method and that of the normal multiple positioning method are experimentally investigated. From the results, the effectiveness of the strategy of how to select parameters, number and pose (position and orientation) of measurement, which is mentioned above, is experimentally confirmed. The accuracy of 0.12mm is achieved in wide area and this value is better than already reported ones about PUMA 560.

著者

伊藤 寛明 伊藤 耕史 荒井 政大 杉本 公一 松倉 利顕 小飼 俊勝

出版者

公益社団法人精密工学会

雑誌

精密工学会誌論文集 = Journal of the Japan Society for Precision Engineering Contributed Papers (ISSN:13488724)

巻号頁・発行日

vol.70, no.6, pp.807-811, 2004-06-05

参考文献数

15

被引用文献数

3 1

---

To apply glass-like carbon (GC) to precision die for press-molding of optical glass lens, the wettability between optical glasses and the GC materials was investigated in nitrogen, argon or air atmosphere heated up to 900-1050°C. The GC material calcinated at about 2000°C (GC20) exhibited larger contact angle than that of the GC materials calcinated at 1300°C or 3000°C. This was caused by that calcination at 1300°C or 3000°C promoted graphite reaction of the GC materials. When the contact angle between the GC20 material and some commercial glasses with different chemical composition was compared, kron (Crown) glass achieved the same large contact angle as flint glass. In the kron glass, lower adhesion or more melted fragment of glass was also observed on the GC20 surface. It was expected that a lack of PbO, Na₂O and K₂O brought on good characteristics of the kron glass.

著者

福田 惠明

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.64, no.7, pp.1000-1003, 1998-07-05

参考文献数

5

---

以上KrFエキシマスキャン露光装置の例からEUVスキャン露光装置のステージ関連の技術課題を概観した.EUVスキャン露光装置の問題は「レチクルステージ, ウエハステージの反力の放出とアクチュエータの放熱およびシステムの熱管理を真空チャンバをもつ系でどう実現するか」であるといっても過言ではない.<BR>EUVスキャン露光装置には大気中で使用するKrFエキシマスキャン露光装置にはない新しい課題もあり, 実際のシステムでは装置全体の統一を考えた設計が必要である.

著者

中森 秀樹 平塚 傑工 ボロレ グウェン

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.71, no.9, pp.1090-1093, 2005-09-05

被引用文献数

1 1

著者

齋藤 長男

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.73, no.3, 2007-03-05

参考文献数

2

著者

片岡 俊彦 遠藤 勝義 井上 晴行 稲垣 耕司 森 勇藏 広瀬 喜久治 高田 和政

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.60, no.8, pp.1122-1126, 1994

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The probe of this scanning near-field optical microscope (SNOM) is a dielectric sphere of 500 nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent wave which is formed by the incidence of He-Ne laser with the wave length of 632.8 nm from the inside of the substrate on the condition of total reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity changes remarkably when a sample is brought in a near-field around the probe. The variation of detected light intensity in the near-field depends on refractive index of sample; the smaller real part of refractive index of sample, the more remarkable increase of detected light intensity. This result is explained by using an electric dipole model for the electromagnetic interaction between probe and sample. The vertical resolution of about 1 nm and lateral resolution of less than 20 nm are obtained for the developed microscope by measuring a standard specimen which is prepared by vacuum evaporation of metal.

著者

青柳 誠司 藤岡 潤 石井 一久 関 啓明 神谷 好承

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 = Journal of the Japan Society of Precision Engineering (ISSN:09120289)

巻号頁・発行日

vol.65, no.7, pp.1035-1040, 1999-07

参考文献数

12

被引用文献数

1

---

Aiming at realizing off-line programming, many researches of improving robot's accuracy by calibrating the kinematic parameters of a robot are being carried out now. For an effective calibration it is necessary to measure the position of the tip of a robot arm precisely in a comparatively wide area. Although a laser tracking system is regarded as the most practical measuring system for this purpose in ISO 9283, there is no report yet which actually applies this system to the robot calibration. In this paper a 6-DOF articulated robot is calibrated by using a laser tracking system according to the joint axis estimating method and the effectiveness of this system is certified. A method of estimating the accuracy which refers to the robot base coordinate system is proposed. It is proved experimentally that the accuracy of the robot before calibration is worse than 3mm. The robot after calibration is positioned to the limited grid which is in the area near the initial pose of the calibration and to the wide grid. The accuracy in the limited grid is improved to be 0.27mm by the calibration, however the accuracy in the wide grid is worse compared with that in the limited grid. From this result it is proved that the joint axis estimating method is not so effective except for the neighborhood of the initial pose.

著者

由川 透

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.61, no.1, pp.17-22, 1995-01-05

著者

佐久田 茂 足立 幹雄 小川 潔 高須 登 上田 勝宣 平 浩三 中野 敏行

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.62, no.10, pp.1444-1448, 1996-10-05

参考文献数

10

被引用文献数

1

---

摩擦駆動を応用した光ディスク原盤露光用テーブル送り機構を開発した.<BR>(1) テーブルの駆動系として, 大ストローク・高分解能でサイクリックエラーのない摩擦駆動を用いた.モータ軸, 支持ローラ, 予圧印加軸の3つのローラによる駆動ロッド支持機構, ダイレクトドライブ, 最大予圧100Nの摩擦駆動機構を採用した.<BR>(2) 干渉計とミラーとの間に分岐ミラーを配置し, レーザ光路を2系統に分割するテーブルのヨーイング自動補正機能を備えたレーザフィードバック制御光学系を設計し, 原盤記録の高精度化を図った.<BR>(3) テーブル位置制御特性に関しては, 10μm/s定速送り時の追従誤差は2。9nm (σ) であった.また1μmステップ応答の3%静定時間は約0.15s, 定常偏差は10nm以下であった.<BR>(4) 本テーブル送り機構を用いた露光装置で実際の露光を行った.nmオーダの精度の安定した記録を実現した.次世代以降の高密度光ディスクに対応した原盤を製作することができた.<BR>今後は, 各種の露光方法・露光形状について, 露光条件を追い込み, 記録の高精度化を目指す.

著者

清水 茂夫 瀧澤 秀樹

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.62, no.6, pp.865-870, 1996-06-05

被引用文献数

3 1

---

The load distribution and life formula for LMBG (Linear Motion Ball Guides) system constructed by two guide blocks on one rail are derived and the theoretical analysis is carried out concerning the basic dynamic.load ratings which are considered with the fluctuations of load distributions, the effect of linear strokes, load eccentricities, conformity factors etc., then the fatigue life test series made up two crowning patterns of guide block raceways are carried out. The results are as follows : (1) The basic dynamic load ratings of LMBG system increase in accordance with the increase in the strokes and decrease in the conformity factors, and decrease in accordance with the increase in the load eccentricities. (2) Theoretically, the probability of flaking occurrence in the guide block raceways is greater than that of the rail, because of the differences between the number of stress cycles and the basic dynamic load rating for the block and rail. (3) In the experiment, the most flaking occurrences are from the rail raceways due to the materials difference from the block and rail. (4) The life test results fit well to the 3-parameter Weibull distribution which is introduced to the location parameter i.e. the minimum life and the Weibull slope m=10/9. (5) The estimated basic dynamic load ratings from two test series are 50% and 90% for the theoretical values, respectively.

著者

城 道介 鳥居塚 卓 大島 俊哉

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.55, no.5, pp.883-889, 1989-05-05

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Eleven operations on a set of two-dimensional domains are defined to grasp and handle clearly the varied types of collision problems in process planning of NC-lathe operations. One of the most essential concepts for the solution of dynamic collision problems is "Interference Domain" determined by a wonk-contour and a tool-contour. When the tip of the tool is located in the interference domain, the tool must collide against the workpiece. Using inversion and envelope operations, an algorithm named "Inversed Template Method" is presented to compute an interference contour easily from complicated contours of work and tool. A computer program is coded as a set of subroutines executing the operations by which several typical collision problems in lathe operations are solved to show the effectiveness of the domain operations.

著者

寺田 英嗣 牧野 洋 今瀬 憲司

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.63, no.11, pp.1609-1613, 1997-11-05

参考文献数

5

被引用文献数

2 2

---

It is important to eliminate the backlash and to reduce inertia for high accuracy linear motion system. For this reason, the trochoid cam rack has been developed. The profile undercut must be avoided to satisfy the required performance. So this rack profile is ground using trochoid curve loci. In this report, the motion principle has been analyzed, and it becomes clear that there is the optimal value of rack profile offset factor which affects on pressure angle and radius of curvature. Also, roller diameter and tooth height affects on those characteristics. The optimal cam rack without profile undercut is designed using the selected each design factor. The prototype cam rack system using optimal design value is made and tested. It is proved that the system has high positioning accuracy without backlash.