著者
中薮 俊博 森 基 滝田 敦夫 岡路 正博 今井 秀孝
出版者
公益社団法人精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.61, no.2, pp.253-257, 1995-02-05
参考文献数
3
被引用文献数
1 5

An accurate and practical system for the measurement of rolling that occurs with the movement of a machine tool unit has been developed. The system consists of a bi-prism, two plane mirrors, and a double-path optical heterodyne laser interferometer. The measurement of rolling with this system is not affected by pitching, yawing, heaving, and swaying. The measurement system was confirmed to have a sensitivity of 0.032μm/arcsec (variation of path length/unit angle of rolling), a resolution of 0.31 arcsec (used in λ/64 measurement system), and 800 mm travel length. In order to investigate the rolling that occurs in a machining centre (680 × 500 × 630 mm), the measurement was carried out in full stroke of each unit in the machining centre. The results show the reliable agreements in replication measurement.
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.79, no.12, pp.1219-1223, 2013-12-05 (Released:2013-12-05)
著者
林 朗弘 佐竹 利文 鈴木 裕
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.64, no.4, pp.531-535, 1998-04-05 (Released:2009-06-30)
参考文献数
8

This paper presents a design of the software platform and framework intended to develop and execute a decentralized autonomous system. The platform has the featured functions that sub-system can be transported on a distributed hardware environment, and functions of sub-system can be remade by joining different two sub-systems together and by separating a sub-system. By using the platform, system designer can easily construct the application that consists of sub-systems behaved as taking in functions of other sub-system and moving on network, if necessary. Furthermore, these functions can be performed by a sub-system remote from the sub-system to be transported, joined or separated. Improving capabilities of system implementation and maintenance can be expected by this remote execution. In this paper, the platform and framework developed in this study are described, then result of an example system implemented into the developed platform is reported for discussing usage and effectiveness of the platform.
著者
岩田 太 川口 誠 佐々木 彰 勝又 章 青山 尚之
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.62, no.1, pp.150-154, 1996-01-05 (Released:2009-06-30)
参考文献数
17

This paper describes a new scanning probe microscope which is able to measure the shearing stress generated by the interaction between the STM tip and the sample surface under STM controlled. The method of measurement is utilized the quartz crystal microbalance technique. The sample is deposited on the AT-cut quartz crystal resonator surface, and the shearing stress which is generated in the sample causes the resonance frequency shift of the quartz crystal resonator. By detecting this signal, we can obtain the shearing stress distribution. The gold thin films have been observed for the STM surface topography and the distribution of subsurface shearing stress simultaneously. In the experiment, the sensitivity of the shearing stress is as high as 0.12 N/m for a 0.05 Hz frequency shift of the quartz crystal resonance frequency.
著者
脇元 修一 鈴森 康一
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.77, no.9, pp.828-831, 2011-09-05 (Released:2012-03-05)
参考文献数
11
著者
宮崎 正明
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.75, no.8, pp.949-952, 2009-08-05 (Released:2011-02-07)
参考文献数
2
被引用文献数
1
著者
鈴木 和夫 上原 勇三 渡辺 弘
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.54, no.2, pp.289-292, 1988-02-05 (Released:2009-10-08)
参考文献数
10
被引用文献数
1

1 0 0 0 OA X線顕微鏡

著者
青木 貞雄
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.57, no.7, pp.1151-1154, 1991-07-05 (Released:2009-10-08)
参考文献数
9
著者
津田 展宏 山田 啓文 石田 文彦 宮下 正之 山口 正高
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.55, no.1, pp.146-151, 1989-01-05 (Released:2009-10-08)
参考文献数
4
被引用文献数
3 3

We have developed the wide range scanning tunneling microscope (STM) to measure surface topography of a diamond turned gold mirror, a gold coated float polished glass surface and so on. Three dimensional positioning of our STM device is achieved not by using a famous piezoelectric tripod, but by monolithic high precision wide ange translation mechanisms, which we call multi-compound parallel spring. One of strong points of this device is that capability of this specially fabricated X-Y stage is to measure over a sample area of 70μm×70μm and is easily cut from a monolith. We have got an information that each diamond tip trace straightness of the turned surface using a high precision air bearing lathe changes noticeably in the portion. This fact shows that we still have to improve not only such manufacturing conditions as tool radius, and the roughness of tool tips but also the surface finish machine environments especially vibrations.
著者
石川 雄一
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.52, no.11, pp.1947-1953, 1986-11-05 (Released:2009-06-30)
参考文献数
10
被引用文献数
1

It has been said that the internal gears have a higher surface durability as compared with the external gears. Nevertheless, experimental study on the load capacity of internal gears has been extremely few. In the present paper, a new type of four square internal gears running test machine has been developed for investigating the load capacity of internal gear pairs experimentally. And some experiments on the conventional involute tooth profile internal gears have been performed by this testing machine. It is confirmed from these experimental results that the fatigue strength of internal gears increases remarkably with increasing the surface hardness of the internal gear by heat treatment.
著者
矢田 恒二
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.56, no.9, pp.1575-1580, 1990-09-05 (Released:2009-06-30)
参考文献数
16
被引用文献数
1 1
著者
加藤 康司
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.56, no.9, pp.1602-1606, 1990-09-05 (Released:2009-06-30)
参考文献数
4
被引用文献数
3 6
著者
町田 尚
出版者
公益社団法人 精密工学会
雑誌
精密工学会誌 (ISSN:09120289)
巻号頁・発行日
vol.56, no.9, pp.1597-1601, 1990-09-05 (Released:2010-02-16)
参考文献数
11
被引用文献数
1