著者

井上 聡史 高橋 巧也 久米村 百子 石橋 和徳 藤田 博之 橋口 原 年吉 洋

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)

巻号頁・発行日

vol.137, no.6, pp.152-158, 2017

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<p>In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm² by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.</p>

著者

本多 史明 細野 智史 末重 良宝 藤野 真久 須賀 唯知 一木 正聡 伊藤 寿浩

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.133, no.11, pp.B320-B325, 2013-11-01 (Released:2013-11-01)

参考文献数

9

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PZT (Pb(Zrx,Ti1-x)O3) thin film capacitors using Nano-transfer method has been developed for the fabrication technology of smaller capacitors. The adhesion strength of Pt to SiO2 was shown to be important among process factors. The adhesion force was shown to be originated from the material diffusion in the crystallization process mainly by the observation of TEM and XPS analysis. In this paper, diffusion of ingredients of PZT which is supposed to be one of the factors of the variation was investigated. It was confirmed that diffusion of Pb certainly occurs and this diffusion reinforces the adhesion strength in accordance with the Pt thickness. It is concluded that the diffusion is surely one of the factors of the variation of the adhesion strength.

著者

梶山 智晴 富田 裕之 宮原 裕二

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.119, no.10, pp.464-469, 1999-10-01 (Released:2008-12-19)

参考文献数

4

被引用文献数

1 1

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We have developed a new method for cleaning flow-through cells by using microbubbles and ultrasonic (US) standing waves. A standing wave generated by US transducers at 1 MHz was used to trap microbubbles at node positions of the sound pressure. We were also able to control the microbubbles' positions spatially through frequency modulation. We found that these microbubbles were very effective for washing microbeads out of flow-through cells, particularly when frequency-modulated US irradiation was used. The proposed method promises to be very useful for cleaning the flow-through cells in small analytical instruments.

著者

小島 洋一郎

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.124, no.4, pp.150-151, 2004 (Released:2004-07-01)

参考文献数

4

被引用文献数

1 1

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In this paper, the waveform of an ultrasonic wave with frequency of approximately 5 MHz propagating through various taste solutions was measured. Furthermore, these solutions were investigated by using surface plasmon resonance (SPR). As a result, differences among solutions were clearly observed. Therefore it was found that the possibility of taste sensing using ultrasonic wave and SPR was obtained from taste solutions.

著者

岡畑 恵雄 古澤 宏幸

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.123, no.11, pp.459-464, 2003 (Released:2004-02-01)

参考文献数

12

被引用文献数

4 7

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A piezoelelctric quartz-crystal plate can be used as a microbalance (a quartz-crystal microbalance, QCM). When substances adsorbed on a gold electrode, a fundamental frequency of a QCM is decreased linearly with increasing mass on the electrode. The host molecule-immobilized QCM is used as a biosensor responding to the addition of guest molecules in aqueous solution in nanogram level.

著者

井手 純一 中本 高道 森泉 豊榮

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.116, no.6, pp.213-218, 1996-07-20 (Released:2009-04-01)

参考文献数

19

被引用文献数

2

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Since odor sensing system is required in many fields, we have developed the system using QCM (Quartz Crystal Microbalance) array and neural-network pattern recognition. Moreover, the system for measuring many samples by an automatic sampling stage has been developed. In the present study, the characterization of the sensing films deposited on QCMs was performed. Responses of 37 kinds of films exposed to 14 sorts of organic vapors were studied to classify sensing films and investigate sensor response models. As a result of the research, it was found that the similarities among films were obtained using principal component analysis, and the frequency shifts could be estimated using multiple regression analysis.

著者

石田 寛 中本 高道 森泉 豊榮

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.116, no.10, pp.429-434, 1996-11-20 (Released:2009-04-01)

参考文献数

9

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A new method for localizing an odor source by mimicking the behavior of silkworm moths is proposed. A male silkworm moth is able to track airborne sexual pheromone to its female counterpart. During the search, a moth draws air from its front to its two antennae by wing vibrations, and turns toward the antenna more strongly stimulated by the pheromone. An artificial system with this mechanism has been realized using a small fan and plural gas sensors instead of the moth's wings and antennae, respectively. The system is called an 'odor compass' since it continuously points to an odor source by rotating the probe to the sensor with the largest response. The capability of its directional probing is successfully demonstrated by the results of estimation of the odor-source direction in a clean room. Furthermore, the improvement of the system to realize the three-dimensional localization, which is often required in a practical environment, is reported, and its feasibility is demonstrated.

著者

徐 嘉楽 野々村 美宗 峯田 貴

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.136, no.10, pp.432-436, 2016-10-01 (Released:2016-10-01)

参考文献数

7

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In this paper, we fabricated periodic micro-bump array structure on Si substrate to evaluate their tactile sensations. Fine-edged Si micro-bump array structures can be easily fabricated by photolithography and dry etching processes. Sensory evaluation of tactile feeling of roughness and frictional resistance with human finger was conducted with paired comparison method. In addition, friction coefficient between the micro-bump array and an artificial finger model that mimics our fingertip was evaluated. The result of sensory evaluation showed that rough feeling was affected by edges of the micro-bump structures even though the grooves between the micro-bumps were narrow as 20 µm. In contrast, frictional resistance feeling did not depend on the effect of the edges. It was strongly affected by a contact area between the micro-bump structure and finger skin. When the width of the grooves between the bump were 100 µm, finger skin entered and touch the bottom of the grooves, and then, the rough feeling and frictional resistance feeling were increased due to the contact area increment. The rough feeling and frictional resistance feeling have little correlation with the frictional coefficient measured with artificial finger model. It was more easy for human skin to enter the narrow grooves, in particular when the groove width was 100 µm.

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.134, no.9, pp.NL9_3-NL9_3, 2014 (Released:2014-09-01)

著者

加藤 義基 平井 義和 亀井 謙一郎 土屋 智由 田畑 修

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.136, no.6, pp.229-236, 2016-06-01 (Released:2016-06-01)

参考文献数

34

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In vitro cell-based assay with human cells is getting attention since the accuracy of preclinical predictions of drug responses should be improved to reducing costly failures in clinical trials. In order to generate reliable predictions, we present a micro-engineered biomimetic systems “Body-on-a-Chip”, to investigate the effects of drugs/metabolites on various organs by assembling a closed-loop medium circulation system on one microfluidic device. For three-dimensional (3-D) polymeric device fabrication, an advanced 3-D lithography with the process optimization method is applied to improve the current soft-lithography technique. Our Body-on-a-Chip is successfully applied to evaluate the effect of an anti-cancer drug (doxorubicin) on cell survival of human heart and liver cells.

著者

安井 学 角嶋 邦之 平林 康男 三田 信 藤田 博之

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.123, no.11, pp.477-482, 2003 (Released:2004-02-01)

参考文献数

8

被引用文献数

1 1

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This paper deals with the new method that makes micro-holes with electrodeposition photoresist (EDPR) as a sacrificial layer. The EDPR was deposited on a silicon-mold made by ICP-RIE. Ni film was plated on a silicon-mold covered with EDPR. Etched through a gap between a silicon-mold and the Ni film, the Ni film came off from the silicon-mold. As a result, we could make Ni films that have micro hole of 9.2µm in diameter, and 56µm in depth on an experimental basis, and verified the silicon-mold that lateral faces of columns did not bare scratch marks. Moreover, the circularity roundness was able to fill 1.5µm which was the specification of the printer nozzle.

著者

広林 茂樹 田村 祐輔 山淵 龍夫 大薮 多可志

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.127, no.4, pp.258-259, 2007

被引用文献数

5 10

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In this paper, we monitored the electromagnetic waves generated by human activity. We investigated a monitoring system that used the bioelectric potential of a plant. Four subjects walked on the spot at a distance of 60 cm from a rubber tree and we measured the variation in the bioelectric potential of the tree produced by the stepping motion. The results confirmed that the electromagnetic waves generated by a person walking on the spot produced a measurable response in the bioelectric potential of a plant. It was also found that this variation in the bioelectric potential varied in synchrony with the subject's walking pace.

著者

沢田 史子 大藪 多可志 吉田 武稔 竹中 幸三郎 B.C. Wolverton

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.122, no.6, pp.300-305, 2002 (Released:2003-03-28)

参考文献数

10

被引用文献数

1 4

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Plants have the capability to purify various atmospheric chemicals. There are, however, few studies on the plant purification-characteristics. In this paper, the purification capability of pothos plant for formaldehyde was investigated. Formaldehyde is one of the typical chemical substances, which cause a sick-building syndrome. The purification capability (Pa) was introduced using a tin oxide gas sensor-output. The experiment was conducted for six different soils. It is recognized that the purification capabilities considerably differ according to the kinds of soils. Namely, the soils, which are mixed with the porous materials such as ceramics, tend to have the high capability. It became obvious that room temperature had also the effects on the purification capability. The optimum temperature, at which the plant had the high capability, was about 22°C.

著者

前中 一介

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.134, no.12, pp.372-377, 2014 (Released:2014-12-01)

被引用文献数

1 3

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This paper describes a human activity monitoring system including various MEMS sensors. Currently, health care devices are in the limelight because aging of society has been progressing and it is required that we should take care our health by ourselves without the help of younger people. For health care, a continuous monitoring system for human activity is effective. The patch type devices, which are installed directly on the body, are one of the candidates for suitable human monitoring system that watches over the daily activity and physical and mental conditions. In this paper, background of the work, current status, requests to the devices and example devices will be shown as well as the example data for activity monitoring. Finally, future demands for the monitoring system are discussed.

著者

新保 達也 東野 翼 大薮 多可志 木村 春彦 南戸 秀仁

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society (ISSN:13418939)

巻号頁・発行日

vol.126, no.7, pp.370-375, 2006-07-01

被引用文献数

5 2 1

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Plant can recognize the environmental factors, for example temperature, humidity, atmospheric pressure and light intensity. Humans can identify the capabilities by measuring the plant bioelectrical potential. It can also recognize the breezing wind. Plants can be regarded as an environmental sensor by using the potential. In this study, the bioelectrical potential characteristic to the wind grade was examined. As for the results, the correlation between the characteristic and the grade was derived. The correlation coefficient was very high. The integrated value for the potential was adopted to derive the relation. Plant can identify the wind intensity by adopting the value. It became obvious that plant has higher capabilities to sense the environmental factors not only temperature, humidity and light intensity but also wind intensity. The application field of plant will spread by using these results.

著者

新保 達也 大薮 多可志 広林 茂樹 竹中 幸三郎

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society (ISSN:13418939)

巻号頁・発行日

vol.124, no.12, pp.470-475, 2004-12-01

被引用文献数

5 11 2

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The bioelectric potential of a foliage plant changes according to an occupant's behavior, for example entering the room in which the plant is installed, as well as watering and touching the plant. The potential shows the impulse responses due to the behaviors. In this study, the integrated values of the bioelectric potential were adopted to identify those behaviors. There are two types of values. Those were derived by integrating the bioelectric potential characteristics for a minute (<i>v</i>_<i>m1</i>) and for an hour (<i>v</i>_<i>h1</i>) respectively. The histogram of the values <i>v</i>_<i>m1</i> for the steady state perfectly took a normal distribution. The frequencies of <i>v</i>_<i>m1</i> for the behaviors were different compared with the steady state distribution. The system can identify the behaviors by examining the frequency table of <i>v</i>_<i>m1</i>. Conversely, it is thought the plant gives us some suggestions using bioelectric potential characteristics. A clue for communication between humans and plants was also obtained. The <i>v</i>_<i>h1</i> becomes higher as the average room temperature (<i>t</i>_<i>r</i>) becomes lower. There was a negative correlation between <i>v</i>_<i>m1</i> and <i>t</i>_<i>r</i>. There were two groups in the scatter diagram of the variables <i>v</i>_<i>m1</i> and <i>t</i>_<i>r</i>.

著者

金子 新

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.134, no.10, pp.NL10_3-NL10_3, 2014 (Released:2014-10-01)

著者

前田 康弘 宮原 裕二

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.131, no.4, pp.166-166, 2011-04-01 (Released:2011-04-01)

著者

秦 誠一

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.131, no.7, pp.NL7_2-NL7_2, 2011-07-01 (Released:2011-07-01)

著者

前中 一介 峯田 貴 石川 智弘 村上 裕二

出版者

一般社団法人 電気学会

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.134, no.6, pp.NL6_3-NL6_8, 2014 (Released:2014-06-01)