著者

長濱 治男

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.44, no.9, pp.822-830, 2001-09-20 (Released:2009-10-20)

参考文献数

13

---

In a inductively or capacitively coupled radio frequency discharge by a single frequency, the transition voltage Vc or power Pc from glow to arc discharge depends on the gas pressure p. When superposing two applied fields with different frequencies at the same time, if Vc decreases comparing with the value of single-frequency discharge, r.f. discharge plasma with high ionization state can be easily generated.In a medium vacuum capacitively coupled r.f. discharge, effects of superposing two applied fields with different frequencies, that is, 2 MHz and 13.5 MHz have been studied. As a result, Vc of 2 MHz side has decreased by the superposed effects in the low pressure region (ω>ν), but Vc has not decreased in the high pressure region (ω<ν). Variations of Pc by the superposed effects in the discharge space of 13.5 MHz side have not been able to observe in all pressure region.

著者

水島 茂喜 植木 正明 根津 嘉明 大岩 彰

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.43, no.3, pp.181-183, 2000-03-20 (Released:2009-10-20)

参考文献数

10

---

A new electronic mass comparator, capable of automatic weighing in vacuum, was introduced into the National Research Laboratory of Metrology. The standard deviation of 0.1 μg, a factor of 3 smaller than the standard deviation of the best previous measurement using a mechanical balance, was achieved for the mass comparison between two 1-kg weights. For eight days, mass difference of two 1-kg weights with the surface area difference of 66.7 cm2 was measured in vacuum. We observed an outgassing rate of 9×10-6 Pa·3·s-1·m-2 after an evacuation for 3.9-6.8 hours, and below 6×10-9 Pa·m3·s-1·m-2 after an evacuation for 107 hours. Residual gas in the vacuum chamber, which housed the electronic mass comparator, was analyzed to monitor the oil contamination. At a total pressure of 5.5×10-4 Pa, we observed the main peaks due to hydrocarbon at 41, 43, and 57 amu with a partial pressure of 3×10-6 Pa.

著者

中山 景次

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.10, pp.618-623, 2006 (Released:2007-06-29)

参考文献数

23

被引用文献数

3 6

著者

小泉 静香 高木 祥示 後藤 哲二

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.47, no.3, pp.247-250, 2004-03-20 (Released:2009-10-20)

参考文献数

9

---

Permeation of hydrogen into the molybdenum disulfide crystal (MoS2) in the hydrogen atmosphere is investigated from a view point of gas release by cleavage. MoS2 crystals are exposed to H2 or D2 gas at temperatures between RT and 600°C, followed by the cleavage at the same temperatures after evacuation of H2 or D2 gas. The dependence of amount of outgassing on the exposed temperature shows similar tendency in H2 and D2 except maximum outgassing temperature. The concentration of hydrogen in the bulk increases at the temperature of 400 or 500°C due to permeation from the surface to the bulk. Beyond the temperatures the concentration in the bulk decreases due to thermal desorption. Regardless of the exposure to D2 gas, many D atoms are detected. The concentration of dissociated hydrogen atoms in MoS2 depends on the exposure temperatures.

著者

原 和雄

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.4, no.11, pp.470-473, 1961-11-20 (Released:2009-09-29)

著者

原 和雄

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.4, no.11, pp.470-473, 1961

著者

森田 清三 杉本 宜昭 オスカル クスタンセ 阿部 真之

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.11, pp.637-641, 2006 (Released:2007-06-29)

参考文献数

12

著者

長島 泰夫 関 李紀 笹 公和 高橋 努

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.50, no.7, pp.475-479, 2007-07-20

著者

齊藤 喜二

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.44, no.7, pp.649-654, 2001-07-20 (Released:2009-10-20)

参考文献数

10

著者

橋場 正男 廣畑 優子 日野 友明 新堀 寛 出山 貞夫 千代田 博宜

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.42, no.12, pp.1100-1105, 1999-12-20

参考文献数

17

被引用文献数

1

---

The gas desorption properties of carbon based materials coated on inner wall of a cathode ray tube were examined by using a technique of thermal desorption spectroscopy (TDS). This material consists of graphite powder, titanium oxide (TiO<SUB>2</SUB>) powder and water glass. The major outgassing species observed in the temperature range from RT to 500&deg;C were CO<SUB>2</SUB> and H<SUB>2</SUB>O. The major outgassing source was graphite. In order to reduce the gas desorption in the cathode ray tube, the heat treatment with temperature higher than 400-500&deg;C is necessary.<BR>Since the surface morphology of graphite-water glass material was dense, the degassing was insufficient by baking treatment in the atmosphere. On the other hand, the degassing was very easy for graphite-TiO<SUB>2</SUB>-water glass material, because of the porous structure.<BR>The gas adsorption experiments were also conducted. The adsorption amount of H<SUB>2</SUB>O or CO<SUB>2</SUB> increased as the composition ratio of graphite powder. The gas adsorption capacity largely increased by the addition of TiO<SUB>2</SUB> powder into the graphite-water glass material. The enhancement of adsorption capacity is due to that the surface structure became porous and also the effective surface area large by the addition of TiO<SUB>2</SUB> powder.

著者

窪田 好浩 辰巳 敬

出版者

一般社団法人 日本真空学会

雑誌

真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN (ISSN:05598516)

巻号頁・発行日

vol.49, no.4, pp.205-212, 2006-04-20

参考文献数

68

被引用文献数

4

著者

高橋 洋平 鈴木 茂

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.2, pp.97-103, 2006 (Released:2006-10-17)

参考文献数

23

著者

秋山 泰伸

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.9, pp.535-540, 2006 (Released:2007-06-15)

参考文献数

19

被引用文献数

2 2

著者

桜木 史郎

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.42, no.11, pp.980-986, 1999-11-20

参考文献数

10

著者

原 信義

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.44, no.10, pp.860-867, 2001-10-20 (Released:2009-10-20)

参考文献数

18

被引用文献数

1 6

著者

青木 勝詔 鈴木 恵友 高梨 久美子 石井 一久 SATYANARAYANA B. S. 尾浦 憲治郎 古田 寛 古田 守 平尾 孝

出版者

一般社団法人 日本真空学会

雑誌

真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN (ISSN:05598516)

巻号頁・発行日

vol.49, no.7, pp.430-432, 2006-07-20

参考文献数

8

---

&nbsp;&nbsp;A novel method to make the sharp emitter tips having low threshold voltage of field emission was achieved using nanodiamond particles on conductive amorphous carbon films. A conductive tetrahedral amorphous (ta) carbon film and nano-sized diamond particles with the size of 50 to 200 nm were sequentially deposited by cathordic arc method using a glass substrate at room temperature. Tip structure with the height of 10 to 40 nm was formed by H₂ plasma etching of the diamond particles/ta-C double layer film. The threshold voltage of the field emission from the tip structures formed by the H₂ plasma etching was 3 V/&mu;m that was significantly lower than 10.4 V/&mu;m for the as-deposited diamond particles/ta-C double layer carbon film. This selective dry etching method using the nano-diamond particles could fabricate sharp and high density nano-sized diamond emitters on conductive ta-C films without any photo-masks of lithography processes.<br>

著者

細川 直吉

出版者

The Vacuum Society of Japan

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.19, no.3, pp.82-89, 1976-03-20 (Released:2009-09-04)

参考文献数

12

被引用文献数

1 1

---

In spite of carefull regulation, the reproducibility of SiO2 deposition rate has been sometimes poor in an rf sputtering system. This paper describes systematic experiments on the relationship between the deposition rate and vacuum quality in some sputtering systems. Data of the deposition rate versus vacuum characteristic parameters such as ultimate prssure, argon flow rate during sputtering, leak rate of air or water vapour, and baking time of the sputtering chamber are given. In addition gas analysis made by quadrupole mass filter shows that the pressure of water vapour is commonly most responsible for the reproducibility of the deposition rate. Internal liquid nitrogen trap pumping selectively water has been proved to be effective to suppress the decrease of the deposition rate and to improve reproducibility.

著者

庄子 習一 荒川 貴博 叶井 正樹 佐藤 寛暢

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.7, pp.395-399, 2006 (Released:2007-05-25)

参考文献数

21

被引用文献数

1 2

著者

梅原 徳次

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.50, no.2, pp.76-81, 2007 (Released:2008-01-01)

参考文献数

47

著者

清水 肇 島田 寿男 平野 洋一 八木 康之 前嶋 良紀 引田 公

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.34, no.3, pp.178-181, 1991